Structural, mechanical, and nanoscale tribological properties of nitrogen-incorporated fluorine-carbon films

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 109-114

  Maia Da Costa, M E H ^a   Sanchez, C M T ^a   Jacobsohn, L G ^b   Freire Jr , F L ^a  

^a PONTIFICAL CATHOLIC UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Ion beam analysis; Raman spectroscopy; Self bias voltage

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; COMPRESSIVE STRESS; ION BEAMS; MECHANICAL PROPERTIES; POLYMERS; RAMAN SPECTROSCOPY; TRIBOLOGY;

ATOMIC DENSITY; CARBON FILMS; ION BEAM ANALYSIS; SELF-BIAS VOLTAGE;

THIN FILMS;

EID: 17644374524     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.161     Document Type: Conference Paper

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