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Volumn 15, Issue 3, 2003, Pages 177-180
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Nanotribological properties of amorphous carbon-fluorine films
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Author keywords
Carbon films; Friction; Lateral force microscopy; PECVD; Surface energy
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
FILM LUBRICANT;
FRICTION;
NANOCRYSTAL;
TRIBOLOGY;
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EID: 0242583829
PISSN: 10238883
EISSN: None
Source Type: Journal
DOI: 10.1023/A:1024848816646 Document Type: Article |
Times cited : (43)
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References (14)
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