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Volumn 15, Issue 3, 2003, Pages 177-180

Nanotribological properties of amorphous carbon-fluorine films

Author keywords

Carbon films; Friction; Lateral force microscopy; PECVD; Surface energy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM LUBRICANT; FRICTION; NANOCRYSTAL; TRIBOLOGY;

EID: 0242583829     PISSN: 10238883     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1024848816646     Document Type: Article
Times cited : (43)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.