Synthesis of fluorinated diamond-like carbon films by the plasma immersion ion processing technique

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 3, 2001, Pages 782-784

  Hakovirta, M ^a   Lee, D H ^a   He, X M ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ETCHING; FLUOROCARBONS; GLOW DISCHARGES; HARDNESS; PLASMA APPLICATIONS; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); WEAR RESISTANCE;

PLASMA IMMERSION ION PROCESSING (PIIP);

DIAMOND LIKE CARBON FILMS;

EID: 0035335250     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1368197     Document Type: Article

References (18)