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Volumn 49, Issue 1, 2005, Pages 37-48

Electrochemical planarization of interconnect metallization

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; ELECTROCHEMISTRY; ELECTROLYTIC POLISHING; ELECTROPLATING; MASS TRANSFER; METALLIZING; REACTION KINETICS;

EID: 13844256567     PISSN: 00188646     EISSN: None     Source Type: Journal    
DOI: 10.1147/rd.491.0037     Document Type: Article
Times cited : (35)

References (64)
  • 3
    • 13844274047 scopus 로고    scopus 로고
    • "Electrodeposition of Copper"
    • Fourth edition, M. Schlesinger and M. Paunovic, Eds., John Wiley & Sons, New York
    • J. W. Dini, "Electrodeposition of Copper," in Modern Electroplating Fourth edition, M. Schlesinger and M. Paunovic, Eds., John Wiley & Sons, New York, 2000.
    • (2000) Modern Electroplating
    • Dini, J.W.1
  • 26
    • 0003482665 scopus 로고
    • Second edition, Prentice-Hall, Inc., Englewood Cliffs, NJ
    • J. S. Newman, Electrochemical Systems, Second edition, Prentice-Hall, Inc., Englewood Cliffs, NJ, 1991, p. 388.
    • (1991) Electrochemical Systems , pp. 388
    • Newman, J.S.1
  • 31
  • 35
    • 85039472599 scopus 로고
    • "Mass Transport Processes in High Rate Metal Dissolution and Deposition"
    • M. Datta, B. R. MacDougall, and J. M. Fenton, Eds., The Electrochemical Society, Pennington, NJ
    • D. Landolt, "Mass Transport Processes in High Rate Metal Dissolution and Deposition," Proceedings of the Symposium on High-Rate Metal Dissolution Processes, M. Datta, B. R. MacDougall, and J. M. Fenton, Eds., The Electrochemical Society, Pennington, NJ, 1995, pp. 1-15.
    • (1995) Proceedings of the Symposium on High-Rate Metal Dissolution Processes , pp. 1-15
    • Landolt, D.1
  • 37
    • 0003482665 scopus 로고
    • Second edition, Prentice-Hall, Inc., Englewood Cliffs, NJ
    • J. S. Newman, Electrochemical Systems, Second edition, Prentice-Hall, Inc., Englewood Cliffs, NJ, 1991, pp. 341-345.
    • (1991) Electrochemical Systems , pp. 341-345
    • Newman, J.S.1
  • 47
    • 0003482665 scopus 로고
    • Second edition, Prentice-Hall, Inc., Englewood Cliffs. NJ
    • J. S. Newman, Electrochemical Systems, Second edition, Prentice-Hall, Inc., Englewood Cliffs. NJ, 1991, pp. 397-425.
    • (1991) Electrochemical Systems , pp. 397-425
    • Newman, J.S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.