Mechanical properties of periodic porous silica low-k films determined by the twin-transducer surface acoustic wave technique

Review of Scientific Instruments

Volumn 74, Issue 10, 2003, Pages 4539-4541

  Xiao, Xia ^a,d   Hata, Nobuhiro ^a   Yamada, Kazuhiro ^b   Kikkawa, Takamaro ^a,c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^c HIROSHIMA UNIVERSITY   (Japan)

^d TIANJIN UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; ELASTIC MODULI; ELECTRIC RESISTANCE; MICROELECTRONICS; NONDESTRUCTIVE EXAMINATION; PERMITTIVITY; PIEZOELECTRIC TRANSDUCERS; SILICA; SURFACE WAVES; ULSI CIRCUITS;

PARASITIC RESISTANCE;

THIN FILMS;

EID: 0142167376     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1611615     Document Type: Article

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