Intrinsic microcrystalline silicon thin films prepared by hot-wire cell method and their application to solar cells

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 12, 2004, Pages 7953-7959

  Ide, Yoshinori ^a   Saito, Yuji ^a   Yamada, Akira ^a   Konagai, Makoto ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Hot wire cell method; Low temperature deposition; Microcrystalline silicon; Solar cell

Indexed keywords

AGING OF MATERIALS; CHEMICAL VAPOR DEPOSITION; PYROMETERS; SECONDARY ION MASS SPECTROMETRY; SILICON; SINGLE CRYSTALS; SOLAR CELLS;

CATALYTIC CHEMICAL VAPOR DEPOSITION (CAT-CVD); HOT-WIRE CELL METHOD; LOW-TEMPERATURE DEPOSITION; MICROCRYSTALLINE SILICON;

THIN FILMS;

EID: 13744262625     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.7953     Document Type: Article

References (26)

1. H. Matsumura and H. Tachibana: Appl. Phys. Lett. 47 (1985) 833.
2. A. H. Mahan, J. Carapella, B. P. Nelson, R. S. Crandall and I. Balberg: J. Appl. Phys. 69 (1991) 6728.
3. S. Klein, F. Finger, R. Carius, T. Dylla, B. Rech, M. Grimm, L. Houben and M. Stutzmann: Thin Solid Films 430 (2003) 202.
4. M. Ichikawa, J. Takeshita, A. Yamada and M. Konagai: Jpn, J. Appl. Phys. 38 (1999) L24.
5. H. Matsumura: Jpn. J. Appl. Phys. 37 (1998) 3175.
6. A. Ledermann, U. Weber, C. Mukherjee and B. Schroder: Thin Solid Films 395 (2001) 61.
7. Y. Ide, K. Asakusa, A. Yamada and M. Konagai: Jpn. J. Appl. Phys. 42 (2003) 1521.
8. Y. Ide, Y. Saito, A. Yamada and M. Konagai: Jpn. J. Appl. Phys. 43 (2004) 2419.
9. H. Matsumura: J. Non-Cryst. Solids 97-98 (1987) 1379.
10. S. Miyajima, A. Yamada and M. Konagai: Thin Solid Films 430 (2003) 274.
11. S. Miyajima, M. Kim, Y. Ide, A. Yamada and M. Konagai: Jpn. J. Appl. Phys. 42 (2003) 3328.
12. T. Oshima, A. Yamada and M. Konagai: Jpn. J. Appl. Phys. 36 (1997) 6481.
13. K. Abe, T. Watahiki, A. Yamada and M. Konagai: Jpn. J. Appl. Phys. 37 (1998) 1202.
14. K. Higuchi, K. Tabuchi, K. S. Lim, M. Konagai and K. Takahashi: Jpn. J. Appl. Phys. 30 (1991) 1635.
15. T. Mates, A. Fejfar, I. Drobohlav, B. Rezek, P. Fojtik, K. Luterova, J. Kocka, C. Koch, M.B. Schubert, M. Ito, K. Ro and H. Uyama: J. Non-Cryst. Solids 299-302 (2002) 767.
16. K. Nakahata, T. Kamiya, C. M. Fortmann, I. Shimizu, H. Stuchlikova, A. Fejfar and J. Kocka: J. Non-Cryst. Solids 266-269 (2000) 341.
17. J. Kocka, A. Fejfar, P. Fojtik, K. Luterova, I. Pelant, B. Rezek, H. Stuchlikova, J. Stuchlik and V. Svrcek: Sol. Ene. Mater. 66 (2001) 61.
18. V. Svrcek, A. Fejfar, P. Fojtik, T. Mates, A. Poruba, H. Stuchlikova, I. Pelant, J. Kocka, Y. Nasuno, M. Kondo and A. Matsuda: J. Non-Cryst. Solids 299-302 (2002) 395.
19. V. Svrcek, I. Pelant, P. Fojtik, J. Kocka, A. Fejfar, J. Tousek, M. Kondo and A. Matsuda: J. Appl. Phys. 92 (2002) 2323.
20. T. Kaneko, M. Wakagi, K. Onisawa and T. Minemura: Appl. Phys. Lett. 64 (1994) 1865.
21. J. Kocka, H. Stuchlikova, J. Stuchlik, B. Rezek, T. Mates, V. Svrcek, P. Fojtik, I. Pelant and A. Fejfar: J. Non-Cryst. Solids 299-302 (2002) 355.
22. E. C. Freeman and W. B. Paul: Phys. Rev. B 18 (1978) 4288.
23. G. Lucovsky, S. S. Chao, J. E. Tyler and W. Czubatyj: Phys. Rev. B 28 (1983) 3225.
24. S. Klein, F. Finger, R. Carius, H. Wagner and M. Stutzmann: Thin Solid Films 395 (2001) 305.
25. Y. Nasuno, M. Kondo and A. Matsuda: Sol. Ene. Mater. 74 (2002) 497.
26. H. Fujiwara, M. Kondo and A. Matsuda: Surf. Sci. 497 (2002) 333.