Effect of temperature and stress on plastic deformation in monocrystalline silicon induced by scratching

Applied Physics Letters

Volumn 86, Issue 1, 2005, Pages

  Zarudi, I ^a   Nguyen, T ^a   Zhang, L C ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; INTEGRATION; MELTING; MICROCRACKS; PHASE TRANSITIONS; PHOTOVOLTAIC CELLS; PLASTIC DEFORMATION; RAMAN SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

BRITTLE FRAGMENTS; CROSS-SECTION; MONOCRYSTALLINE SILICON; SCRATCHING; ULTRAPRECISION;

SILICON;

EID: 13544273938     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1847692     Document Type: Article

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