Towards a deeper understanding of plastic deformation in mono-crystalline silicon

International Journal of Mechanical Sciences

Volumn 43, Issue 9, 2001, Pages 1985-1996

  Zhang, Liangchi ^a   Zarudi, Irena ^a  

^a UNIVERSITY OF SYDNEY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; OXYGEN; PHASE TRANSITIONS; PLASTICITY; SHEAR STRESS; SILICON;

HYDROSTATIC STRESS; MONO-CRYSTALLINE SILICON;

PLASTIC DEFORMATION;

EID: 0035452158     PISSN: 00207403     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0020-7403(01)00024-8     Document Type: Article

References (21)

1. Ultra-micro-indentation of silicon and compound semiconductors with spherical indenters
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3. Ductile-regime turning mechanism of single-crystal silicon
4. The extent of phase transformation in silicon hardness indentation
5. The deformation behaviour of ceramic crystals subjected to very low load (nano)indentations
6. Nanoscale tribophysics and tribomechanics
7. Plastic deformation of silicon during contact sliding at ambient temperature
8. Determination of surface plastic and elastic-plastic properties of ultra micro-indentation
9. High resolution studies of crystalline damage induced by lapping and single-point machining of Si(100)
10. Changes in surface area and composition during grinding of silicon in environments of various quality
11. Oxygen precipitation behavior in 300 mm polished Czochralski silicon wafers
12. Effect of ultraprecision grinding on microstructural change in silicon monocrystals
13. Structural change in mono-crystalline silicon subjected to indentation-experimental findings
14. An understanding of the chemical effect on the nano-wear deformation in mono-crystalline silicon components
15. Subsurface damage in alumina induced by single-point scratching
16. Subsurface damage in single-crystal silicon due to grinding and polishing
17. On the mechanics and physics in the nano-indentation of silicon mono-crystals
18. Atomic scale deformation in silicon monocrystals induced by two-body and three-body contact sliding
19. Molecular dynamics simulation of phase transformations in silicon monocrystals due to nano-indentation
20. Effect of repeated nano-indentations on the deformation in monocrystalline silicon
21. On some fundamental problems in grinding