|
Volumn 225-229, Issue I, 1999, Pages 669-
|
An understanding of the chemical effect on the nano-wear deformation in mono-crystalline silicon components
|
Author keywords
Chemical effect; Mono crystalline silicon; Nano wear
|
Indexed keywords
AMORPHOUS SILICON;
CRYSTALLINE MATERIALS;
DEFORMATION;
MATHEMATICAL MODELS;
MICROSCOPIC EXAMINATION;
MONO-CRYSTALLINE MATERIALS;
NANO-WEAR DEFORMATION;
WEAR OF MATERIALS;
DEFORMATION;
SILICON;
WEAR;
|
EID: 0033500127
PISSN: 00431648
EISSN: None
Source Type: Journal
DOI: 10.1016/s0043-1648(98)00378-0 Document Type: Article |
Times cited : (41)
|
References (14)
|