Enhancement of iodine adsorption on ruthenium glue layer for seedless CECVD of Cu

Electrochemical and Solid-State Letters

Volumn 8, Issue 2, 2005, Pages

  Lee, Hyun Bae ^a   Kwak, Dong Kee ^a   Kang, Sang Won ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ADSORPTION; CHEMICAL VAPOR DEPOSITION; COPPER; DIFFUSION; ELECTRIC CONDUCTIVITY; ION BEAMS; PHYSICAL VAPOR DEPOSITION; RUTHENIUM; X RAY PHOTOELECTRON SPECTROSCOPY;

ATOMIC LAYER DEPOSITION (ALD); CARRIER GASES; FEEDING GAS LINES; FOCUSED ION BEAMS (FIB);

IODINE;

EID: 13444269072     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1850393     Document Type: Article

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