Silicon nitride thin films Young's modulus determination by an optical non destructive method

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 6, 1997, Pages

  Buchaillot, Lionel ^a   Farnault, Etienne ^a   Hoummady, Moussa ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; MODAL ANALYSIS; NATURAL FREQUENCIES; NONDESTRUCTIVE EXAMINATION; THIN FILMS;

OPTICAL BEAM DEFLECTION (OBD);

SILICON NITRIDE;

EID: 0031152965     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.l794     Document Type: Article

References (8)