A review of electrostatic discharge (ESD) in advanced semiconductor technology

Microelectronics Reliability

Volumn 44, Issue 1, 2004, Pages 33-46

  Voldman, Steven H ^a  

^a IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC BREAKDOWN; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC LOSSES; ELECTROSTATICS; ETCHING; MOS DEVICES; PROBABILITY DISTRIBUTIONS; RESINS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE MODELS;

ELECTROSTATIC DISCHARGES (ESD); SEMICONDUCTOR SCALING;

ELECTRIC DISCHARGES;

EID: 0346781606     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2003.10.004     Document Type: Article

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