Manufacturing-Aware Physical Design

IEEE/ACM International Conference on Computer-Aided Design, Digest of Technical Papers

Volumn , Issue , 2003, Pages 681-687

  Gupta, Puneet ^a   Kahng, Andrew B ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; OPTICAL RESOLVING POWER; OPTICAL SYSTEMS; PHASE SHIFT; PHOTOLITHOGRAPHY;

PHYSICAL DESIGN (PD); RESOLUTION ENHANCEMENT TECHNIQUES (RET); STATISTICAL TIMING;

INTEGRATED CIRCUIT LAYOUT;

EID: 0346778720     PISSN: 10923152     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/iccad.2003.159753     Document Type: Conference Paper

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