Sensitive copper detection in P-type CZ silicon using μPCD

Journal of the Electrochemical Society

Volumn 150, Issue 12, 2003, Pages

  Vainola H ^a   Yli Koski, M ^a   Haarahiltunen, A ^a   Sinkkonen, J ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; HIGH INTENSITY LIGHT; NUCLEATION; PHOTOCONDUCTIVITY; PRECIPITATION (CHEMICAL); SEMICONDUCTING SILICON;

CZOCHRALSKI SILICON; PHOTOCONDUCTIVE DECAY;

COPPER;

EID: 0345759675     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1624845     Document Type: Article

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