Recent progress of (Ba,Sr)TiO3 thin films for tunable microwave devices

Journal of Electronic Materials

Volumn 32, Issue 10, 2003, Pages 1125-1134

  Zhu, Xinhua ^a,b   Zhu, Jianmin ^a   Zhou, Shunhua ^a   Liu, Zhiguo ^a   Ming, Naiben ^a   Lu, Shengguo ^b   Chan, Helen Lai Wah ^b   Choy, Chung Loong ^b  

^a NANJING UNIVERSITY   (China)

^b HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

Dielectric properties; Dielectric tuning; Ferroelectric thin films; Tunable microwave devices

Indexed keywords

ANNEALING; BARIUM COMPOUNDS; COMPOSITION; DEFECTS; DIELECTRIC PROPERTIES; FERROELECTRIC MATERIALS; INTERFACES (MATERIALS); MICROWAVE DEVICES; OXYGEN; STRESSES;

DIELECTRIC TUNABILITY; FERROELECTRIC THIN FILM; FILM COMPOSITION; FILM STRESS; HIGH-FREQUENCY DIELECTRICS; OXYGEN DEFECTS;

THIN FILMS;

EID: 0242367987     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-003-0098-y     Document Type: Article

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