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IEEE Microwave and Wireless Components Letters

Volumn 12, Issue 1, 2002, Pages 3-5

Tunable barium strontium titanate thin film capacitors for RF and microwave applications

(7) Tombak, Ali a,b Maria, Jon Paul c Ayguavives, Francisco d Jin, Zhang a,c Stauf, Gregory T e Kingon, Angus I a,c Mortazawi, Amir a,b

a IEEE (United States)

b UNIVERSITY OF MICHIGAN (United States)

c Electrical and Computer Engineering Department (United States)

d Crystal Associates (United States)

e ENTEGRIS INC (United States)

Author keywords

(Ba, Sr)TiO 3; Barium strontium titanate; BST; Ferroelectric; MOCVD; Thin film; Tunable capacitor; Varactor

Indexed keywords

TUNABLE CAPACITORS;

BARIUM COMPOUNDS; DIELECTRIC LOSSES; FERROELECTRIC THIN FILMS; MATHEMATICAL MODELS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROWAVES; PERMITTIVITY; TUNING;

VARACTORS;

EID: 0036222363 PISSN: 15311309 EISSN: None Source Type: Journal
DOI: 10.1109/7260.975716 Document Type: Article

Times cited : (168)

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