Ferroelectric thin films in microelectromechanical systems applications

MRS Bulletin

Volumn 21, Issue 7, 1996, Pages 59-65

  Polla, D L ^a   Francis, L F ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACTUATORS; CERAMIC MATERIALS; FABRICATION; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PIEZOELECTRIC MATERIALS; SENSORS; SURFACE TREATMENT; THIN FILMS;

FERROELECTRIC CERAMICS; FERROELECTRIC THIN FILMS; LEAD ZIRCONATE TITANATE; MICROACTUATORS; MICROSENSORS;

DIELECTRIC FILMS;

EID: 0030197147     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S0883769400035934     Document Type: Article

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