The electrical properties of Ba1-xSrxTiO3 thin films grown by sputter deposition

Integrated Ferroelectrics

Volumn 21, Issue 1-4, 1998, Pages 429-440

  Wills, Laura A ^a   Schmitz, Thorsten ^b   Reyes, Tina ^a   Amano, Jun ^a  

^a HEWLETT PACKARD LABORATORIES   (United States)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Barium strontium titanate; Dielectric constant; Resistance degradation; Scattering parameter measurement; Sputter deposition

Indexed keywords

BARIUM COMPOUNDS; CURRENT DENSITY; DIELECTRIC PROPERTIES OF SOLIDS; FILM GROWTH; LEAKAGE CURRENTS; MAGNETRON SPUTTERING; PERMITTIVITY; SPUTTER DEPOSITION; THIN FILMS;

BARIUM STRONTIUM TITANATE; RESISTANCE DEGRADATION; SCATTERING PARAMETER MEASUREMENT;

DIELECTRIC FILMS;

EID: 0032316856     PISSN: 10584587     EISSN: None     Source Type: Journal    
DOI: 10.1080/10584589808202083     Document Type: Article

References (9)

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