Soft x-ray photoelectron spectroscopy of (HfO2) x(SiO2)1-x hlgh-k gate-dielectric structures

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 4, 2003, Pages 1777-1782

  Ulrich, M D ^a   Hong, J G ^a   Rowe, J E ^a   Lucovsky, G ^a   Chan, A S Y ^b   Madey, T E ^b  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b RUTGERS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BINDING ENERGY; COMPOSITION; DIELECTRIC MATERIALS; HAFNIUM COMPOUNDS; INTERFACES (MATERIALS); PHONONS; SILICA; THICK FILMS; ULTRATHIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

GAUSSIAN WIDTH;

FIELD EFFECT TRANSISTORS;

EID: 0141569714     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (32)

1. International Roadmap for Semiconductors (Semiconductor Industry Association, San Jose, CA, 2001); http://public.itrs.net/
2. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 89, 5243 (2001).
3. G. D. Wilk and R. M. Wallace, Appl. Phys. Lett. 74, 2854 (1999).
4. G. D. Wilk, R. M. Wallace, and J. M. Anthony, J. Appl. Phys. 87, 484 (2000).
5. A. Callegari, E. Cartier, M. Gribelyuk, H. F. Okorn-Schmidt, and T. Zabel, J. Appl. Phys. 90, 6466 (2001).
6. R. L. Opila, G. D. Wilk, M. A. Alain, B. van Dover, and B. M. Busch, Appl. Phys. Lett. 81, 1788 (2002).
7. O. Renault, D. Samour, J.-F. Damlencourt, D. Blin, F. Martin, S. Marthon, N. T. Barrett, and P. Besson, Appl. Phys. Lett. 81, 3627 (2002).
8. H. Kang, Y. Roh, G. Bae, D. Jung, and C.-W. Yang, J. Vae. Sci. Technol. B 20, 1360 (2002).
9. M. Gutowski, J. E. Jaffe, C.-L. Liu, M. Stoker, R. I. Hegde, R. S. Rai, and P. J. Tobin, Appl. Phys. Lett. 80, 1897 (2002).
10. H. Kato, T. Nango, T. Miyagawa, T. Katagiri, K. S. Seol, and Y. Ohki, J. Appl. Phys. 92, 1106 (2002).
11. M. A. Quevedo-Lopez, M. El-Bouanani, M. J. Kim, B. E. Gnade, R. M. Wallace, M. R. Visokay, M. Douglas, M. J. Bevan, and L. Colombo, Appl. Phys. Lett. 81, 1609 (2002).
12. M. A. Quevedo-Lopez, M. El-Bouanani, B. E. Gnade, R. M. Wallace, M. R. Visokay, M. Douglas, M. J. Bevan, and L. Colombo, J. Appl. Phys. 92, 3540 (2002).
13. D. A. Muller and G. D. Wilk, Appl. Phys. Lett. 79, 4195 (2001).
14. G. B. Rayner, Jr., D. Kang, Y. Zhang, and G. Lucovsky, J. Vac. Sci. Technol. B 20, 1748 (2002).
15. M. J. Guittet, J. P. Crocombette, and M. Gautier-Soyer, Phys. Rev. B 63, 125117 (2001).
16. H. Kim and P. C. McIntyre, J. Appl. Phys. 92, 5094 (2002).
17. F. Giustino, A. Bongiorno, and A. Pasquarello, Appl. Phys. Lett. 81, 4233 (2002).
18. G.-M. Rignanese, F. Detraux, X. Gonze, A. Bongiorno, and A. Pasquarello, Phys. Rev. Lett. 89, 117601 (2002).
19. F. J. Himpsel, F. R. McFreely, A. Taleb-Ibrahimi, J. A. Yarmoff, and G. Hollinger, Phys. Rev. B 38, 6084 (1988).
20. Z. H. Lu, M. J. Graham, D. T. Jiang, and K. H. Tan, Appl. Phys. Lett. 63, 2941 (1993).
21. F. Rochet, Ch. Poncey, G. Dufour, H. Roulet, C. Guillot, and F. Sirotti, J. Non-Cryst. Solids 216, 148 (1997).
22. K. Z. Zhang, J. N. Greeley, M. M. Banaszak Holl, and F. R. McFeely, J. Appl. Phys. 82, 2298 (1997).
23. J. W. Keister, J. E. Rowe, J. J. Kolodziej, H. Niimi, H.-S. Tao, T. E. Madey, and G. Lucovsky, J. Vac. Sci. Technol. A 17, 1250 (1999).
24. M. D. Ulrich, R. S. Johnson, J. G. Hong, G. Lucovsky, J. S. Quinten, and T. E. Madey, J. Vac. Sci. Technol. B 20, 1732 (2002).
25. L. Pauling, The Nature of the Chemical Bond and the Structure of Molecules and Crystals (Cornell University Press, Ithaca, NY, 1960), p. 93.
26. T. L. Ban, J. Vac. Sci. Technol. A 9, 1793 (1991).
27. H. A. Macleod, Thin-Film Optical Filters, 3rd ed. (Institute of Physics, Philadelphia, 2001), p. 623.
28. H. R. Philipp in Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, Orlando, 1985), p. 760.
29. M. Iwan and C. Kunz, Phys. Lett. 60A, 345 (1977).
30. C. Kittel, Introduction to Solid State Physics, 5th ed. (Wiley, New York, 1976), p. 306.
31. R. Browning, M. A. Sobolewski, and C. R. Helms, Phys. Rev. B 38, 13407 (1988).
32. A. Pasquarello, M. S. Hybertsen, and R. Car, Phys. Rev. B 53, 10942 (1996).