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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 4, 2002, Pages 1748-1758

Nonlinear composition dependence of x-ray photoelectron spectroscopy and Auger electron spectroscopy features in plasma-deposited zirconium silicate alloy thin films

(4) Rayner Jr , G B a Kang, D a Zhang, Y a Lucovsky, G a

a NORTH CAROLINA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; BINDING ENERGY; CHEMICAL BONDS; COMPOSITION; THERMAL EFFECTS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRONEGATIVITY EQUALIZATION; ZIRCONIUM SILICATE ALLOY THIN FILMS;

ZIRCONIUM ALLOYS;

EID: 0035982614 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1493788 Document Type: Conference Paper

Times cited : (104)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.