Structural defects in amorphous silicon oxynitride and silicon nitride

Defect and Diffusion Forum

Volumn 218-220, Issue , 2003, Pages 39-49

  Kato, H ^a   Ohki, Y ^a  

^a WASEDA UNIVERSITY   (Japan)

Author keywords

Amorphous Materials; Band Tail States; Paramagnetic Defects; Photoluminescence; Poole Frenkel Conduction; Static Disorder

Indexed keywords

DEFECTS; ELECTRIC FIELD EFFECTS; HYDROGEN; IRRADIATION; OPTOELECTRONIC DEVICES; PARAMAGNETIC RESONANCE; PHOTOLUMINESCENCE; PHOTONS; SILICON NITRIDE;

DATA STORAGE CAPACITY;

AMORPHOUS MATERIALS;

EID: 0041841550     PISSN: 10120386     EISSN: 16629507     Source Type: Journal    
DOI: 10.4028/www.scientific.net/ddf.218-220.39     Document Type: Review

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