Band-tail photoluminescence in hydrogenated amorphous silicon oxynitride and silicon nitride films

Journal of Applied Physics

Volumn 93, Issue 1, 2003, Pages 239-244

  Kato, Hiromitsu ^a   Kashio, Norihide ^a   Ohki, Yoshimichi ^a   Seol, Kwang Soo ^a,b   Noma, Takashi ^a,c  

^a WASEDA UNIVERSITY   (Japan)

^b INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^c SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; CHARGE COUPLED DEVICES; HYDROGENATION; PHOTOMULTIPLIERS; PHOTONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SILICON NITRIDE; SYNCHROTRON RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

RADIATIVE TUNNELINGS;

PHOTOLUMINESCENCE;

EID: 0037245739     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1529292     Document Type: Article

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