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Volumn 68, Issue 19, 1996, Pages 2723-2725

Revision of H2 passivation of Pb interface defects in standard (111)Si/SiO2

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0542363921     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115577     Document Type: Review
Times cited : (68)

References (13)
  • 1
    • 30844431996 scopus 로고    scopus 로고
    • 2 defect physics, see the 13 articles in Semicond. Sci. Technol. 4, 961 (1989), and reference therein.
    • 2 defect physics, see the 13 articles in Semicond. Sci. Technol. 4, 961 (1989), and reference therein.
  • 2
    • 0019529879 scopus 로고    scopus 로고
    • E. Poindexter, P. Caplan, B. Deal, and R. Razouk, J. Appl. Phys. 52, 879 (1981); R. Helms and E. Poindexter, Rep. Prog. Phys. 57, 791 (1994).
    • E. Poindexter, P. Caplan, B. Deal, and R. Razouk, J. Appl. Phys. 52, 879 (1981); R. Helms and E. Poindexter, Rep. Prog. Phys. 57, 791 (1994).
  • 5
    • 21544453090 scopus 로고    scopus 로고
    • See, e.g., E. Kooi, Philips Res. Rep. 21, 477 (1966).
    • See, e.g., E. Kooi, Philips Res. Rep. 21, 477 (1966).
  • 7
    • 11744293896 scopus 로고    scopus 로고
    • K. L. Brower, Phys. Rev. B 42, 3444 (1990); K. L. Brower and S. M. Myers, Appl. Phys. Lett. 57, 162 (1990).
    • K. L. Brower, Phys. Rev. B 42, 3444 (1990); K. L. Brower and S. M. Myers, Appl. Phys. Lett. 57, 162 (1990).
  • 8
    • 21544456982 scopus 로고    scopus 로고
    • ox ranges.
    • ox ranges.
  • 9
    • 0041029472 scopus 로고    scopus 로고
    • A. Stesmans and G. Van Gorp, Phys. Rev. B 42, 3765 (1990); 45, 4344 (1992).
    • A. Stesmans and G. Van Gorp, Phys. Rev. B 42, 3765 (1990); 45, 4344 (1992).
  • 11
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    • f.
    • f.
  • 12
    • 0024169724 scopus 로고    scopus 로고
    • R. A. Kohler, R. A. Kushner, and K. H. Lee, IEEE Trans. Nucl. Sci. NS-35, 1492 (1988); R. E. Stahlbush, A. H. Edwards, D. L. Griscom, and B. J. Mrstik, J. Appl. Phys. 73, 658 (1993).
    • R. A. Kohler, R. A. Kushner, and K. H. Lee, IEEE Trans. Nucl. Sci. NS-35, 1492 (1988); R. E. Stahlbush, A. H. Edwards, D. L. Griscom, and B. J. Mrstik, J. Appl. Phys. 73, 658 (1993).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.