Atomic structure, band offsets and hydrogen in high K oxide:silicon interfaces

Materials Research Society Symposium - Proceedings

Volumn 747, Issue , 2003, Pages 99-111

  Robertson, J ^a   Peacock, P W ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; CRYSTAL ATOMIC STRUCTURE; HYDROGEN; PERMITTIVITY; SILICON; STOICHIOMETRY;

NEUTRALITY LEVELS;

INTERFACES (MATERIALS);

EID: 0041519011     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (34)

1. G Wilk, R M Wallace, J M Anthony, J App Phys 89 5243 (2001)
2. J Robertson, J Vac Sci Technol B 18 1785 (2000); P W Peacock, J Robertson, J App Phys 92 4712 (2002)
3. J Robertson, J Vac Sci Technol B 18 1785 (2000); P W Peacock, J Robertson, J App Phys 92 4712 (2002)
4. Y C Yeo, T J King, C Hu, App Phys Lett 81 2091 (2002)
5. M V Fischetti, D A Neumayer, E A Cartier, J App Phys 90 4587 (2001)
6. R A McKee, F J Walker, M F Chisholm, Phys Rev Lett 81 3014 (1998)
7. R A McKee, F J Walker, M F Chisholm, Science 293 468 (2001)
8. G Y Yang, J M Finder, J Wang, Z Yu, J Ramdani, R Droopad, K W Eisenbeiser, R Ramjesh, J Mat Res 17 204 (2002)
9. S J Wang, C K Ong, S Y Xu, P Chen, W C Tjiu, J W Chai, A C H Huan, W J Yoo, J S Lim, W Feng, W K Choi, App Phys Lett 78 1604 (2001); S Wang, C K Ong, App Phys Lett 80 2541 (2002)
10. S J Wang, C K Ong, S Y Xu, P Chen, W C Tjiu, J W Chai, A C H Huan, W J Yoo, J S Lim, W Feng, W K Choi, App Phys Lett 78 1604 (2001); S Wang, C K Ong, App Phys Lett 80 2541 (2002)
11. S Guha, N A Bojarczuk, V Narayanam, App Phys Lett 80 766 (2002)
12. G Apostolopoulos, et al, App Phys Lett 81 3549 (2002)
13. W A Harrison, Phys Rev B 18 4402 (1978)
14. F Herman, R V Kawowski, J Vac Sci Technol 19 395 (1981)
15. Y Tu, J Tersoff, Phys Rev Lett 84 4393 (2000)
16. A Ourmazd, D W Taylor, J A Rentschler, J Bevk, Phys Rev Lett 59 213 (1987)
17. A Pasquarello, M S Hybertsen, R Car, Phys Rev Lett 74 1024 (1995)
18. D Cherns, G R Anstis, J L Hutchison, J C H Spence, Philos Mag A 46 849 (1982); 49 165 (1984)
19. D Cherns, G R Anstis, J L Hutchison, J C H Spence, Philos Mag A 46 849 (1982); 49 165 (1984)
20. S Satpathy, R M Martin, Phys Rev B 39 8494 (1989); H Fujitani, S Asano, Surf Sci 268 265 (1992)
21. S Satpathy, R M Martin, Phys Rev B 39 8494 (1989); H Fujitani, S Asano, Surf Sci 268 265 (1992)
22. R M Tromp, R C Reuter, Phys Rev Lett 61 1756 (1988)
23. M C Payne, M P Teter, D C Allan, T A Arias, J D Joannopoulos, Rev Mod Phys 64 1045 (1992)
24. X Zhang, A Demkov, H Li, X Hu, J Kulik, unpublished work
25. J W Keiser, J E Rowe, J J Kolodziej, H Niimi, T E Madey, G Lucovsky, J Vac Sci Technol B 17 1831 (1999)
26. A S Foster, V B Sulimov, F Lopez Gejo, A L Shluger, R N Nieminen, Phys Rev B 64 224108 (2001)
27. A S Foster, F Lopez Gejo, A L Shluger, R N Nieminen, Phys Rev B 65 174117 (2002)
28. R E Stahlbush, A H Edwards, D L Griscom, B J Mrstik, J App Phys 73 658 (1993)
29. C G van de Walle, P J H Denteener, Y Bar Yam S T Pantelides, Phys Rev B 39 10791 (1989)
30. L Pavesi, P Giannozzi, Phys Rev B 46 4621 (1992)
31. J Neugebauer, C G van de Walle, Phys Rev Lett 75 4452 (1995)
32. A Yokozawa, Y Miyamoto, Phys Rev B 55 13783 (1997)
33. C G van de Walle, Phys Rev Lett 85 1012 (2000)
34. C Kilic, A Zunger, App Phys Let 81 73 (2002)