Growth, characterization and properties of CVD diamond films for applications as radiation detectors

Rivista del Nuovo Cimento della Societa Italiana di Fisica

Volumn 22, Issue 10, 1999, Pages 1-89

  Sciortino, S ^a  

^a Dipartimento di Energetica   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039527098     PISSN: 0393697X     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02872270     Document Type: Article

References (232)

1. RUSSEL C. J., CVD Diamond Markets in the 21th century, in Synthetic Diamond, edited by K. E. SPEAR and J. P. DISMUKES (John Wiley & Sons, New York) 1994, pp. 625-647.
2. YODER M. N., CVD The Vision of Diamond as an Engineered Material, in Synthetic Diamond, edited by K. E. SPEAR and J. P. DISMUKES (John Wiley & Sons, New York) 1994, pp. 3-17.
3. SEEGER K., in Semiconductor Physics (Springer-Verlag, Berlin, Heidelberg) 1985, pp. 23-24.
4. ASCHROFT N. W. and MERMIN D. N., Solid State Physics (HRW International Editions, New York) 1976, p. 76.
5. YODER M. N., Diamond Properties and Applications, in Diamond Films and Coatings, edited by R. F. DAVIS (Noyes Publications, Park Ridge, NJ, USA) 1993, pp. 1-30.
6. ANGUS J. C., WANG Y. and SUNKARA M., Annu. Rev. Mater. Sci., 21 (1991) 221.
7. FONG C. Y. and KLEIN B. M., Electronic and Vibrational Properties of Bulk Diamond, in Diamond: Electronic Properties and Applications, edited by L. S. PAN and D. R. KANIA (Kluwer Academic Publishers, Boston) 1995, pp. 1-29.
8. SNAIL K. A., Opt. Mater., 1 (1992) 235.
9. Graphs by courtesy of R. S. Sussmann, DeBeers Industrial Diamond Division (UK) Ltd.
10. COLLINS A. T., The Electronic and Optical Properties of Diamond, in The Physics of Diamond, Proceedings of the International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE (IOS Press, Amsterdam) 1997.
11. FIELD J. E., Natural Diamond: The Standard, in Diamond and Diamond-Like Films and Coatings, Proceedings of a NATO Advanced Study, Castelvecchio Pascoli, Italy 1990, edited by R. E. CLAUSING, L. H. HORTON, J. C. ANGUS and P. KOIDL, Vol. B266 (Plenum Press, New York) 1991, pp. 17-35.
12. WILKS J. and WILKS E., in Properties and Application of Diamond (Butterworth Heinemann, Oxford) 1991, pp. 62-94.
13. VAN ENCKEVORT W. J. P., Physical, Chemical and Microstructural Characterization and Properties of Diamond, in Synthetic Diamond, edited by K. E. SPEAR and J. P. DISMUKES (John Wiley & Sons, New York) 1994, pp. 307-353.
14. PANKOVE J. I. and QIU C. H., Optical Properties and Optoelectronic Applications of Diamond, in Synthetic Diamond, edited by K. E. SPEAR and J. P. DISMUKES (John Wiley & Sons, New York) 1994, pp. 401-418.
15. FERRER N. and NOGUÉS-CARULLA J. M., Diamond Relat. Mater., 5 (1996) 598.
16. RAND S. C. and DE SHAZER L. G., Opt. Lett., 10 (1985) 481.
17. COLLINS A. T. and LIGHTOWLERS E. C., The Electrial Properties, in The Properties of Diamond, edited by J. E. FIELD (Academic Press, London) 1979, pp. 79-105.
18. COLLINS A. T., The Electrial and Optical Properties of Semiconducting Diamond, in Thin Film Diamond (Chapman and Hall, London) 1994, pp. 63-74.
19. COLLINS A. T., The Electronic and Optical Properties of Thin Film Diamond, Proceedings of Topical Symposium II on New Diamond and Diamond-like Films of the 8th CIMTEC-World Ceramic Congress and Forum on New Materials, Firenze, Italy, 1994, edited by P. VINCENZINI (Techna, Faenza, Italy) 1995, pp. 315-326.
20. HERMANN C. and SAPOVAL B., in Physics of Semiconductor (Springer Verlag, New York) 1995, p. 105.
21. SZE S. M., in Physics of Semiconductor Devices (John Wiley & Sons, New York) 1981, pp. 30-35.
22. LIGHTOWLERS E. C. and COLLINS A. T., J. Phys. D, 9 (1976) 951.
23. DAVIS E. A. and COMPTON W. D., Phys. Rev., 140 (1965) A2183.
24. WILLIAMS A. W. S., LIGHTOWLERS E. C. and COLLINS A. T., J. Phys. C, 3 (1970) 1727.
25. MOTT N. F., Philos Mag., 19 (1969) 835.
26. MASSARANI B., BOURGOIN J. C. and CHRENKO R. M., Phys. Rev. B, 17 (1978) 1758.
27. BOURGOIN J. and LANNOO M., Point Defects in Semiconductors II, Experimental Aspects (Springer Verlag, Berlin) 1983.
28. GROT A. S., Active Diamond Electronic Devices, in Diamond: Electronic Properties and Applications, edited by L. S. PAN and D. R. KANIA (Kluwer Academic Publishers, Boston) 1995, pp. 443-461.
29. VISSER E. P., BAHUHUIS G. J., JANSSEN G., VOLLENBERG W., VAN ENCKEVORT W. J. P. and GILLING L. J., J. Phys. Condens. Matter, 4 (1992) 7365.
30. FUJIMORI N., NAKAHATA H. and IMAI T., Jpn. J. Appl. Phys., 29 (1990) 824.
31. COLLINS A. T., Characterization of CVD and HPHT Diamond, in SIF Conference Proceedings, Eurodiamond 96, Torino, 1996, Vol. 52, edited by C. MANFREDOTTI and E. VITTONE (Editrice Compositori, Bologna) 1996, pp. 105-110.
32. PARTLOW W. D., RUAN J., WITKOWSKJ R. E., CHOYKE W. J. and KNIGHT D. S., J. Appl. Phys. 67 (1990) 7019.
33. ROBINS L. H., COOK P. L., FARABAUGH E. N. and FELDMAN A., Phys. Rev. B, 39 (1989-II) 13367.
34. COLLINS A. T., KAMO M. and SATO Y., J. Phys. D, 22 (1989) 1402.
35. DEAN P. J., Phys. Rev., 139 (1965) A588.
36. RUAN J., KOBASHI K. and CHOYKE W. J., Appl. Phys. Lett., 60 (1992) 3138.
37. FREITAS J. A. JR., KLEIN P. B. and COLLINS A. T., Appl. Phys. Lett., 64 (1994) 2136.
38. KLEIN P. B., CROSSFIELD M. D., FREITAS J. A. Jr. and COLLINS A. T., Phys. Rev. B, 51 (1995-1) 9634.
39. MARINELLI M., HATTA A., ITO T., HIRAKI A. and NISHINO T. Appl. Phys. Lett., 68 (1996) 1.
40. COLLINS A. T., KAMO M. and SATO Y. J. Phys. Condens. Matter, 1 (1989) 4029.
41. DEAN P. J., LIGHTOWLERS E. C. and WRIGHT D. R., Phys. Rev., 140 (1965) A352.
42. KAWARADA H., YOKOTA Y. and HIRAKI A., Appl. Phys. Lett., 57 (1990) 1889.
43. ROBINS L. H., FARABAUGH E. N. and FELDMAN A., Phys. Rev. B, 48 (1993-I) 14167.
44. FUCHS F., WILD C., SCHWARZ K. and KOIDL P., Diamond Relat. Mater., 4 (1995) 652.
45. GRAY K. J., Proc. Conf. on Diamond Optics V, SPIE, 1759 (1992) 203.
46. Graph by courtesy of Dirk Meier of CERN, Geneva, and Roberto Bini of LENS, Florence.
47. SUSSMANN R. S., BRANDON J. R., SCARSBROOK G. A., SWEENEY C. G., VALENTINE T. J., WHITEHEAD A. J., and WORT C. J. H., Diamond Relat. Mater., 3 (1994) 303.
48. SUSSMANN R. S., Industrial Diamond Rev., 2 (1993) 1.
49. CLARK C. D., KANDA H., KIFLAWI I., and SITTAS G., Phys. Rev. B, 51 (1995) 16681.
50. YODER M. N., Diamond: Potential and Status, in Diamond and Diamond-Like Films and Coatings, Proceedings of a NATO Advanced Study, Castelvecchio Pascoli, Italy 1990, edited by R. E. CLAUSING, L. H. HORTON, J. C. ANGUS and P. KOIDL, Vol. B266 (Plenum Press, New York) 1991, pp. 1-16.
51. KLAGES C.-P., Thermal Conductivity of Diamond and Diamond Thin Films, in The Physics of Diamond, International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE (IOS Press, Amsterdam) 1997.
52. RAVI K. V., Technological Application of CVD Diamond, in Synthetic Diamond, edited by K. E. SPEAR and J. P. DISMUKES (John Wiley & Sons, New York) 1994, pp. 533-580.
53. SUSSMAN R. S., SCARSBROOK G. A., WORT C. J. H. and WOOD R. M. Diamond Relat. Mater., 3 (1994) 1173.
54. VALENTINE T. J., WHITEHEAD A. J., SUSSMANN R. S., WORT C. J. H. and SCARSBROOK G. A., Diamond Relat. Mater., 3 (1994) 1168.
55. WORT C. J. H., SWEENEY C. G., COOPER M. A., SCARSBROOK G. A. and SUSSMANN R. S., Diamond Relat. Mater., 3 (1994) 1158.
56. DAVIDSON J. L., Diamond Electrical Properties and Electronic Device Behavior, in Synthetic Diamond, edited by K. E. SPEAR and J. P. DISMUKES (John Wiley and Sons, New York) 1994, pp. 355-399.
57. PAN L. S., HAN S., KANIA D. R., HAN S., PLANO M. A. and LANDSTRASS M. I., Diamond Relat. Mater. 2 (1993) 820.
58. KOBA R. J., Technology of Vapor Phase Growth of Diamond Films, in Diamond Films and Coatings, edited by R. F. DAVIS (Noyes Publications, Park Ridge, NJ, USA) 1993, pp. 147-182.
59. ANGUS J. C. and HAYMAN C. H., Science, 241 (1988) 913.
60. SPYTSIN B. V., Origin and Evolution of the Science and Technology of Diamond Synthesis in the USSR, in Diamond and Diamond-Like Films and Coatings, Proceedings of a NATO Advanced Study, Castelvecchio Pascoli, Italy 1990, edited by R. E. CLAUSING, L. H. HORTON, J. C. ANGUS and P. KOIDL, Vol. B266 (Plenum Press, New York) 1991, pp. 855-873.
61. ANGUS J. C., Development of Low-Pressure Diamond Growth in the United States, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 21-39; FEDOSEEV D. M., Summary of Research on Diamond Growth from the Gas Phase in Russia, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 41-56; SETAKA N., Development of Diamond Science and Technology in Japan, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 57-90.
62. ANGUS J. C., Development of Low-Pressure Diamond Growth in the United States, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 21-39; FEDOSEEV D. M., Summary of Research on Diamond Growth from the Gas Phase in Russia, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 41-56; SETAKA N., Development of Diamond Science and Technology in Japan, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 57-90.
63. ANGUS J. C., Development of Low-Pressure Diamond Growth in the United States, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 21-39; FEDOSEEV D. M., Summary of Research on Diamond Growth from the Gas Phase in Russia, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 41-56; SETAKA N., Development of Diamond Science and Technology in Japan, in Synthetic Diamond (John Wiley & Sons, New York) 1994, pp. 57-90.
64. ANGUS J. C., A Short History of Diamond Synthesis, in The Physics of Diamond, International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE (IOS Press, Amsterdam) 1997.
65. BACCI T., BORCHI E., BRUZZI M., SANTORO M. and SCIORTINO S., Mat. Sci. Eng. B, 47 (1997) 54.
66. ANGUS J. C., ARGOITIA A., GAT R., LI Z., SUNKARA M., WANG L. and WANG Y., in Chemical Vapour Deposition of Diamond, in Thin Film Diamond (Chapman and Hall, London) 1994, pp. 1-14.
67. MOUSTAKAS T. D., Growth of Diamond by CVD Methods and Effects of Process Parameters, in Synthetic Diamond, edited by K. E. SPEAR and J. P. DISMUKES (John Wiley & Sons, New York) 1994, pp. 145-192.
68. BACHMANN B. K., LEERS D. and LYDTIN H., Diamond Relat. Mater., 1 (1991) 1.
69. BACHMANN P. K. and LYDTIN H., High Rate versus Low Rate Diamond CVD Methods, in Diamond and Diamond-Like Films and Coatings, Proceedings of a NATO Advanced Study, Castelvecchio Pascoli, Italy 1990, edited by R. E. CLAUSING, L. H. HORTON, J. C. ANGUS and P. KOIDL, Vol. B266 (Plenum Press, New York) 1991, pp. 829-853.
70. NASSAU K., Synthesis of Bulk Diamond: History and Present Status, in Diamond Films and Coatings, edited by R. F. DAVIS (Noyes Publications, Park Ridge, NJ, USA) 1993, pp. 31-67.
71. WILKS J. and WILKS E., in Properties and Application of Diamond (Butterworth Heinemann, Oxford) 1991, pp. 8-10.
72. BUNDY F. P., HALL H. T., STRONG H. M. and WENTFORT R. H., Nature, 176 (1955) 51.
73. GEIS M. W. and ANGUS J. C., Sci. Am. October issue (1992) 64.
74. ANGUS J. C., WILL H. A. and STANKO W. S., J. Appl. Phys., 39 (1968) 2915.
75. BACHMANN P. K., Microwave plasma CVD and related techniques for Low Pressure Diamond Synthesis, in Thin Film Diamond (Chapman and Hall, London) 1994, pp. 31-53.
76. BACHMANN P. K., Plasma Chemical Vapor Deposition of Diamond Films, in The Physics of Diamond, International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE (IOS Press, Amsterdam) 1997.
77. MATSUMOTO S., SATO Y., KAMO M. and SETAKA N., Jpn. J. Appl. Phys., 21 (1982) L183.
78. SAWABE A. and INUZUKA T., Appl. Phys. Lett., 46 (1985) 146.
79. HIROSE Y. and TERASAWA Y., Jpn. J. Appl. Phys., 25 (1986) L519.
80. LI D. M., MäNTILA T. and LEVOSKA J., High Methane Concentration for Diamond Synthesis by Hot-Filament Assisted Chemical Vapor Deposition, Proceedings of Topical Symposium II on New Diamond and Diamond-like Films of the 8th CIMTEC-World Ceramic Congress and Forum on New Materials, Firenze, Italy, 1994, edited by P. VINCENZINI (Techna, Faenza, Italy) 1995, pp. 61-76.
81. KAMO M., SATO Y., MATSUMOTO S. and SETAKA N., J. Crystal Growth, 62 (1983) 642.
82. HIROSE Y. et al., Proceedings of the First International Symposium on Diamond and Diamond-like Films, Pennington, NJ, 1989, edited by J. P. DISMUKES, A. J. PURDES, B. S. MEYERSON, T. D. MOUSTAKAS, K. E. SPEAR, K. V. RAVI and M. YODER, Vol. 89-12 (The Electrochemical Society) 1989, pp. 80.
83. SUZUKI K., SAWABE A., YASUDA K. and INUZUKA T., Appl. Phys. Lett., 50 (1987) 728.
84. SUZUKI K., SAWABE A. and INUZUKA T., Jpn. J. Appl. Phys., 29 (1990) 153.
85. WANG W., LIAO K. and GAO G., Phys. Status Solidi A, 126 (1991) K115.
86. POLUSHKIN V. M., POLYAKOV S. N., RAKHIMOV A. T., SUETIN N. V., TIMOFEYEV M. A. and TUGAREV V. A., Diamond Relat. Mater., 3 (1994) 531.
87. SATRAPA D., HAUBNER R. and LUX B., Surf. Coating Technol., 47 (1991) 59.
88. HARTMANN P., HAUBNER R. and LUX B., Diamond Relat. Mater., 5 (1996) 850.
89. KURIHARA K., SASAKI K., KAWARADA M. and KOSHINO N., Appl. Phys. Lett. 52 (1988) 437.
90. OHTAKE et al., Proceedings of the First Internatinal Symposium on Diamond and Diamond-like Films, Pennington, NJ, 1989, edited by J. P. DISMUKES, A. J. PURDES, B. S. MEYERSON, T. D. MOUSTAKAS, K. E. SPEAR, K. V. RAVI and M. YODER, Vol. 89-12 (The Electrochemical Society) 1989, pp. 93-105.
91. LU G. and SWANN W. T., Appl. Phys. Lett., 59 (1991) 1556.
92. LU G. and BIGELOW L. K., Diamond Relat. Mater., 1 (1992) 134.
93. MITSUDA Y., YOSHIDA T. and AKASHI K., Rev. Sci. Instrum., 60 (1989) 249.
94. ANGUS J. C., Structure and Thermochemistry of Diamond, in The Physics of Diamond, International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE (IOS Press, Amsterdam), 1997.
95. ANGUS J. C. and EVANS E. A., in Material Research Society Meeting, S. Francisco, 1994, MRS Symp. Proc., Vol. 349 (Materials Res. Soc., Pittsburgh, PA) 1994, pp. 385-390.
96. ANGUS J. C. and EVANS E. A., Steady-State Analysis of Nucleation Growth and Non-Diamond Carbon Incorporation during the Chemical Vapor Deposition of Diamond, in The Physics of Diamond, International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE (IOS Press, Amsterdam) 1997.
97. ANGUS J. C., Generalized Reactor Model For Chemical Vapor Deposition of Diamond, in The Physics of Diamond, International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE (IOS Press, Amsterdam) 1997.
98. BACHMANN P. K., HAGEMANN H. J., LADE H., LEERS D., PICHT F., and WIECHERT D. U., in Diamond, SiC, and Nitride Wide Bandgap Semiconductors, edited by C. H. CARTER, G. GILDENBLATT, S. NAKAMURA, R. J. NEMANICH, MRS Symp. Proc., Vol. 339 (Materials Res. Soc., Pittsburgh, PA) 1994, p. 267.
99. CASSIDY W. D., EVANS E. A., WANG Y., ANGUS J. C., BACHMANN P. K., HAGEMANN H. J., LEERS D. and WIECHERT D. U., in Diamond, SiC, and Nitride Wide Bandgap Semiconductors, edited by C. H. CARTER, G. GILDENBLATT, S. NAKAMURA and R. J. NEMANICH, MRS Symp. Proc., Vol. 339 (Materials Res. Soc., Pittsburgh, PA) 1994, p. 285.
100. PRIJAYA N. A., ANGUS J. C. and BACHMANN P. K., Diamond Relat. Mater., 3 (1993) 129.
101. KLAGES C.-P., Heteroepitaxial and Textured Growth of Diamond Thin Films, in The Physics of Diamond, International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE, Vol. 135 (IOS Press, Amsterdam) 1997.
102. PLANO L. S. G., Growth of CVD Diamond for Electronic Applications, in Diamond: Electronic Properties and Applications, edited by L. S. PAN and D. R. KANIA (Kluwer Academic Publishers, Boston) 1995, pp. 61-138.
103. JIANG X. and KLAGES C.-P., Heteroepitaxy of Diamond on Silicon, Proceedings of Topical Symposium II on New Diamond and Diamond-like Films of the 8th CIMTEC-World Ceramic Congress and Forum on New Materials, Firenze, Italy, 1994, edited by P. VINCENZINI (Techna, Faenza, Italy) 1995, pp. 23-30.
104. JIANG X. and KLAGES C.-P., Phys. Status Solidi A, 154 (1996) 175.
105. JUBBER M. G. and MILNE D. K., Phys. Status Solidi A, 154 (1996) 185.
106. SCHRECK M. and STRIZKER B., Phys. Status Solidi A, 154 (1996) 197.
107. VON KAENEL Y. et al., Phys. Status Solidi A, 154 (1996) 219.
108. SATTEL S., GERBER J. and EHRHARDT H., Phys. Status Solidi A, 154 (1996) 141.
109. KULISH W. ACKERMANN L. and SOBISCH B., Phys. Status Solidi A, 154 (1996) 155.
110. SUZUKI T. and ARGOITIA A., Phys. Status Solidi A, 154 (1996) 239.
111. LOCHER W., WILD C., HERRES N., BEHR D. and KOIDL P., Appl. Phys. Lett., 65 (1994) 34.
112. JIN S. and MOUSTAKAS T. D., Appl. Phys. Lett., 65 (1994) 403.
113. ZHU W., STONER B. R., WILLIAMS B. E. and GLASS J. T., Proc. IEEE, 79 (1991) 621.
114. YARBROUGH W. A. and MESSIER R., Science, 247 (1990) 688.
115. BACHMANN P. K. and WIECHERT D. U., Characterization and Properties of Artificially Grown Diamond, in Diamond and Diamond-Like Films and Coatings, Proceedings of a NATO Advanced Study, Castelvecchio Pascoli, Italy 1990, edited by R. E. CLAUSING, L. H. HORTON, J. C. ANGUS and P. KOIDL, Vol. B266 (Plenum Press, New York) 1991, pp. 677-713.
116. LETTINGTON A. H., Application of Diamond-like (Hard Carbon) Films, in Diamond and Diamond-Like Films and Coatings, Proceedings of a NATO Advanced Study, Castelvecchio Pascoli, Italy 1990, edited by R. E. CLAUSING, L. H. HORTON, J. C. ANGUS and P. KOIDL, Vol. B266 (Plenum Press, New York) 1991, pp. 481-498.
117. LETTINGTON A. H., Application of Diamond-like Carbon Thin Films, in Thin Film Diamond, edited by A. LETTINGTON and J. W. STEEDS (Chapman and Hall, London) 1994, pp. 117-126.
118. GRILL A. and MEYERSON B. S., in Development and Status of Diamondlike Carbon, in Synthetic Diamond, edited by K. E. SPEAR and J. P. DISMUKES (John Wiley & Sons, New York) 1994, pp. 91-141.
119. BACCI T., BORCHI E., BRUZZI M., MEIER D., SANTORO M. and SCIORTINO S., Nucl. Phys. B (Proc. Suppl.), 61B (1998) 303.
120. BACCI T., SANTORO M. and SCIORTINO S., Deposition of Continuous Diamond Film onto Molybdenum Substrates by DC plasma CVD, in SIF Conference Proceedings, Eurodiamonds 96, Torino 1996, edited by C. MANFREDOTTI and E. VITTONE, Vol. 52 (Editrice Compositori, Bologna) 1996, pp. 119-126.
121. EVERHART T. E. and HAYES T. L., Sci. Am. (1972) 55.
122. ASCHROFT N. W. and MERMIN D. N., Solid State Physics (HRW International Editions, 1976), pp. 104-108.
123. ZHAO S., Ph.D. Thesis, The Ohio State University, 1994.
124. CHALKER P. R., Characterization of Diamond and Diamond-like Films, in Diamond and Diamond-Like Films and Coatings, Proceedings of a NATO Advanced Study, Castelvecchio Pascoli, Italy 1990, edited by R. E. CLAUSING, L. H. HORTON, J. C. ANGUS and P. KOIDL, Vol. B266 (Plenum Press, New York) 1991, pp. 127-150.
125. SOLIN S. A. and RAMDAS A. K., Phys. Rev. B, 1 (1970) 1687.
126. SHRODER R. E., NEMANICH R. J. and GLASS J. T., Phys. Rev. B, 41 (1990) 3738.
127. TUINSTRA F. and KOENIG J. L., J. Chem. Phys. 33 (1970) 1126.
128. AGER III J. W., VEIRS D. K. and ROSENBLATT G. M., Phys. Rev. B, 43 (1991) 6491.
129. SAILS S. R., GARDINER D. J., BOWDEN M., SAVAGE J. and HAQ S., Appl. Phys. Lett., 65 (1994) 43.
130. BACCI T., BORCHI E., BRUZZI M., SANTORO M. and SCIORTINO S., Mat. Sci. Eng. B, 48 (1997) 268.
131. ZHU W., BADZIAN A. R. and MESSIER R., Morphological phenomena of CVD diamond (part I), in Proc. SPIE Diamond Optics III, Bellingham, WA, edited by A. FELDMAN and S. HOLLY, Vol. 1325 (SPIE-The International Society for Optical Eng.) 1990, pp. 187-201.
132. CLAUSING R. E., HORTON L., SPECHT L. L., BEGUN G. M. and WANG Z. L. Diamond Relat. Mater., 1 (1992) 411.
133. WILD C., KOIDL P., MÜLLER-SEBERT W., WALCHER H., KOHL R., HERRES N., LOCHER R., SAMLENSKI R. and BRENN R., Diamond Relat. Mater., 2 (1993) 158.
134. WILKS J. and WILKS E., in Properties and Application of Diamond (Butterworth Heinemann, Oxford) 1991, pp. 109-173.
135. Photograph by courtesy of Dirk Meier of CERN and Prof. Laura M. Bonzi of the Laboratorio di Citologia of the University of Florence.
136. CULLITY B. D., Elements of X-ray Diffraction (Addison-Wesley, Reading, MA) 1978, pp. 99-106.
137. BIGGERI U., BORCHI E., BRUZZI M., LEROY C., SCIORTINO S., BACCI T., ULIVI L., ZOPPI M. and FURETTA C. Nuovo Cimento A, 109 (1996) 1277.
138. VAN DER DRIFT A., Philips Res. Rep., 22 (1967) 297.
139. BACCI T., BORCHI E., BRUZZI M., SANTORO M. and SCIORTINO S., Mat. Sci. and Eng. B, 53 (1998) 284.
140. BACCI T., BORCHI E., BRUZZI M., SANTORO M. and SCIORTINO S., Inorg. Mater., 34 (1998) 321.
141. GALLUZZI F., MARINELLI M., MASOTTI L., MILANI E., PACE E., ROSSI M. C., SALVATORI S., SANTORO M., SCIORTINO S. and TUCCIARONE A., in Frontier Detectors for Frontier Physics, 7th Pisa Meeting on Advanced Detectors, May 25-31, 1997, La Biodola, Isola d'Elba, Italy, Nucl. Instrum. Methods A, 409 (1998) 423.
142. NØRGÂRD C. and MATTHEWS A., Diamond Relat. Mater., 5 (1996) 332.
143. BORCHI E., BRUZZI M., LEROY C. and SCIORTINO S., J. Phys. D, 31 (1998) 1.
144. WERNER M., DORSCH O., HINZE A., OBERMEIER E., HARPER R. E., JOHNSTON C., CHALKER P. R. and BUCKLEY-GOLDER I. M., Diamond Relat. Mater., 2 (1993) 825.
145. MUTO Y., SUGINO T., SHIRAFUJI J. and KOBASHI K., Appl. Phys. Lett., 59 (1991) 843.
146. FIEGL B., KUHNERT R., BEN-CHORIN M. and KOCH F., Appl. Phys. Lett., 65 (1994) 371.
147. WAGNER J., RAMSTEINER M., WILD C., KOIDL P. and GLASS J. T., Phys. Rev. B, 40 (1989-11) 1817.
148. WAGNER J., WILD C., BOWDEN M. and KOIDL P., Appl. Phys. Lett., 59 (1991) 779.
149. LEEDS S. M., DAVIS T. J., MAY P. W., PICKARD C. D. O. and ASHFOLD M. N. R. Diamond Relat. Mater., 7 (1998) 233.
150. SIMMONS J. G., J. Phys. D, 4 (1971) 613.
151. GONON P., DENEUVILLE A., FONTAINE F. and GHEERAERT E., J. Appl. Phys., 78 (1995) 6633.
152. MORT J., MACHONKIN M. A. and OKUMURA K., Appl. Phys. Lett., 59 (1991) 455.
153. MUTO Y., SUGINO T., KOBASHI K.and SHIRAFUJI J., Jpn. J. Appl. Phys., 31 (1992) L4.
154. BORCHI E., BRUZZI M., MEIER D., PIROLLO S., SANTORO M. and SCIORTINO S., Frontier Detectors for Frontier Physics, 7th Pisa Meeting on Advanced Detectors, La Biodola, Isola d'Elba, Italy, May 25-31, 1997, Nucl. Instrum. Methods A, 409 (1998) 240.
155. BORCHI E., BRUZZI M., PIROLLO S. and SCIORTINO S. Solid-State Electron., 41 (1998) 429.
156. FRANKLIN M. et al., Nucl. Instrum. Methods A, 315 (1992) 39.
157. BIGGERI U., BORCHI E., BRUZZI M., LI Z. and LAZANU S., IEEE Trans. Nucl. Sci., 41 (1994) 964.
158. GOSSICK B. R., J. Appl. Phys., 30 (1959) 1259.
159. MOLL M., Proceedings of the 2nd International Conference on Semiconductor Materials, Detectors and Devices, Florence 1998, Nucl. Instrum. Methods A, 426 (1999) 87.
160. WUNSTORF R., BENKERT M., CLAUSSEN N., FRETWURST E., LINDSTRÖM G. and SCHULTZ T., Nucl. Instrum. Methods A, 315 (1992) 149.
161. CHENG L. J., CORELLI J. C., CORBETT J. W. and WATKINS G. D., Phys. Rev 152 (1966) 152.
162. WATKINS G. D. and CORBETT J. W., Phys. Rev. A, 134 (1964) 1359.
163. WATKINS G. D. and CORBETT J. W., Phys. Rev. A, 138 (1965) 543.
164. BIGGERI U., BORCHI E., BRUZZI M., PIROLLO S., SCIORTINO S., LAZANU S. and LI Z., Nucl. Instrum. Methods A, 400 (1997) 113.
165. BIGGERI U., BORCHI E., BRUZZI M., CATACCHINI E., LAZANU S., LI Z., PIROLLO S. and SCIORTINO S., Proceedings of the 2nd International Conference on Semiconductor Materials, Detectors and Devices, Florence 1998, Nucl. Instrum. Methods A, 426 (1999) 126.
166. BIGGERI U., BORCHI E., BRUZZI M., EREMIN V., LAZANU S., LEROY C., LI Z., PIROLLO S., SCIORTINO S. and VERBITSKAJA E., IEEE Trans. Nucl. Sci., 45 (1998) 597.
167. BORCHI E., BRUZZI M., LEROY C., PIROLLO S. and SCIORTINO S., Nucl. Phys. B (Proc. Suppl.), 61 (1998) 481.
168. PAN L. S., HAN S., KANIA D. R., ZHAO S., GAN K. K., KAGAN H., KASS R., MALCHOW R., MORROW F., PALMER W. F., WHITE C., KIM S. K., SANNES F., SCHNETZER S., STONE R., THOMSON G. B., SUGIMOTO Y., FRY A., KANDA S., OLSEN S., FRANKLIN M., AGER III J. W. and PIANETTA P., J. Appl. Phys., 74 (1993) 1086.
169. TACHIBANA T., WILLIAMS B. E. and GLASS J. T., Phys. Rev. B, 45 (1992-11) 968.
170. TACHIBANA T., WILLIAMS B. E. and GLASS J. T., Phys. Rev. B, 45 (1992-11) 975.
171. TACHIBANA T. and GLASS J. T., Electrical Contacts to Diamond, in Diamond: Electronic Properties and Applications, edited by L. S. PAN and D. R. KANIA (Kluwer Academic Publishers, Boston) 1995, pp. 319-348.
172. KANIA D. R., Diamond Radiation Detectors, CVD Diamond Development for Radiation Detectors, in The Physics of Diamond, Proceedings of the International School of Physics "Enrico Fermi", Course CXXXV, Varenna, Italy, 1996, edited by A. PAOLETTI and A. TUCCIARONE (IOS Press, Amsterdam) 1997.
173. PLANO A. M., Electronic Device Processing, in Diamond: Electronic Properties and Applications, edited by L. S. PAN and D. R. KANIA (Kluwer Academic Publishers, Boston) 1995, pp. 349-370.
174. LANDSTRASS M. I. and RAVI K. V., Appl. Phys. Lett. 55 (1989) 975.
175. RAMO S., Proceedings of I.R.E. (1939) 584.
176. MANFREDOTTI C., FIZZOTTI F., VITTONE E., BISTOLFI S., BOERO M. and POLESELLO P., Nucl. Instrum. Methods B, 93 (1994) 516.
177. ZHAO S., GAN K. K., KAGAN H., KASS R., MALCHOW R., MORROW F., PALMER W., WHITE C., PAN L. S., HAN S., KANIA D., PLANO M., LANDSTRASS M., LEE M., KIM S., SANNES F., SCHNETZER S., STONE R., THOMSON G., SUGIMOTO Y., FRY A., KANDA S. and OLSEN S., Mat. Res. Soc. Symp. Proc., 302 (1993) 257.
178. PLANO M. A., ZHAO S., GARDINIER C. F., LANDSTRASS M. I., KANIA D. R, KAGAN H., GAN K. K., KASS R., SCHNETZER S. and STONE R., Appl. Phys. Lett 64 (1994) 193.
179. PAN L. S., KANIA D. R., PIANETTA P. and LANDEN O. L., Appl. Phys. Lett., 57 (1990) 623.
180. PLANO M. A., LANDSTRASS M. I., PAN L. S., HAN S., KANIA D. R., MCWILLIAMS S. and AGER III J. W., Science, 260 (1993) 1310.
181. MEYER D. FOR THE RD42 COLLABORATION Proceedings of the Fifth International Symposium on Diamond Materials edited by J. L. DAVIDSON, W. D. BROWN, A. GICQUEL, B. V. SPITSYN and J. C. ANGUS, Vol. 97-32,(The Electrochemical Society Inc., Pennington, New Jersey, USA) 1998, pp. 491-497.
182. RD42 COLLABORATION (KAGAN H. et al.), Proceedings of the 2nd International Conference on Radiation Effects on Semiconductor Materials, Detector and Devices, Florence, March 1998 (unpublished).
183. RD42 COLLABORATION (MEIER D. et al.), SIF Conference Proceedings, Eurodiamonds 96, Torino 1996, Vol. 52, edited by C. MANFREDOTTI and E. VITTONE (Editrice Compositori, Bologna) 1996, pp. 105-110.
184. RD42 COLLABORATION (HUSSON D. et al.), Nucl. Instrum. Methods Phys. Res. A, 388 (1997) 421.
185. TRISCHUK W. FOR THE RD42 COLLABORATION Proceedings of the International Europhysics Conference on High Energy Physics, edited by Lemonne, VanderVelde and Verbeure (World Scientifc Publishing Co.) 1996, p. 593.
186. ZÖLLER M. for the RD42 COLLABORATION, IEEE Trans. Nucl. Sci., 44 (1997) 815.
187. KRAMMER M. for the RD42 COLLABORATION, Nucl. Instrum. Methods A, 418 (1998) 196.
188. WEILHAMMER P. for the RD42 COLLABORATION, Frontier Detectors for Frontier Physics, 7th Pisa Meeting on Advanced Detectors, La Biodola, Isola d'Elba, Italy, 1997, Nucl. Instrum. Methods A, 409 (1998) 264.
189. BORCHELT F., DULINSKI W., GAN K. K., HAN S., HASSARD J., HOWARD A., KAGAN H., KANIA D. R., KASS R., LU G., NYGARD E., PAN L. S., SCHNETZER S., STONE R., STRAVER J., TESAREK R. J., TRISCHUK W., WEILHAMMER P., WHITE C., WOODIN R. L. and ZHAO S. Nucl. Instrum.Methods Phys. Res. A, 354 (1995) 318.
190. KANIA D. R., PAN L. S., BELL P., LANDEN O. L., KORNBLUM H., PIANETTA P. and PERRY M. D., Appl. Phys. Lett., 68 (1990) 124.
191. MC KEAG R. D. et al., Diamond Relat. Mater., 6 (1997) 374.
192. MARINELLI M., MILANI E., PACE E., PAOLETTI A., SANTORO M., SANTORO M., SCIORTINO S., TUCCIARONE A. and VERONA-RINATI G., to be published in Diamond Relat. Mater.
193. MARINELLI M., MILANI E., PACE E., PAOLETTI A., SANTORO M., SCIORTINO S., TUCCIARONE A. and VERONA-RINATI G., Proceedings of the Fifth International Symposium on Diamond Materials edited by J. L. DAVIDSON, W. D. BROWN, A. GICQUEL, B. V. SPITSYN and J. C. ANGUS, Vol. 97-32 (The Electrochemical Society Inc., Penninton, New Jersey, USA) 1998, pp. 556-570.
194. RANDALL J. J. and WILKINS M. H. F., Proc. R. Soc. London, Ser. A, 184 (1945) 366; 390.
195. GARLICK G. F. and GIBSON A. F., Proc. R. Soc. London, Ser. A, 60 (1948) 574.
196. ADIROVITCH E. I., J. Phys. Rad., 17 (1956) 705.
197. LEWANDOWSKI A. C. and MCKEEVER S. W. S., Phys. Rev. B, 43 (1991) 8163.
198. PLANSKOY B., Phys. Med. Biol., 25 (1980) 519.
199. BURGEMEISTER E. A., Phys. Med. Biol., 26 (1981) 269.
200. BURGEMEISTER E. A. and SCHOUTEN W., Radiation Protection Dosimetry, 6 (1984) 145.
201. VATNITSKY S. M., KHRUNOV V. S., FOMINYCH V. I. and SCHUELELL E., Radiat. Protec. Dosim., 47 (1993) 515.
202. NAM T. L., KEDDY R. J. and BURNS R. C., Med. Phys., 14 (1987) 569.
203. KEDDY R. J. and NAM T. L., Radiat. Phys. Chem., 41 (1993) 767.
204. AVILA O. and BUENTIL A. E., Radiation Protection Dosimetry, 58 (1995) 61.
205. BORCHI E., BRUZZI M., LEROY C. and SCIORTINO S., SIF Conference Proceedings, Eurodiamond 96, Torino 1996, Vol. 52, edited by C. MANFREDOTTI and E. VITTONE (Editrice Compositori, Bologna) 1996, pp. 127-134.
206. CHEN R., J. Electrochem. Soc., 116 (1969) 1254.
207. MCKEEVER S. W. S., in Thermoluminescence of Solids (Cambridge University Press, Cambridge) 1985, p. 89.
208. BOGANI F., BORCHI E., BRUZZI M., LEROY C. and SCIORTINO S., Nucl. Instrum. Methods Phys. Res. A, 388 (1997) 427.
209. MCKEEVER S. W. S., Nucl. Instrum. Methods, 175 (1980) 19.
210. ABRAMOWITZ M. and STEGUN I., Handbook of Mathematical Functions (Mat. Bureau of Standards) 1964, p. 231.
211. NAHUM J. and HALPERIN A., J. Phys. Chem. Solids, 18 (1961) 297.
212. NAHUM J. and HALPERIN A., J. Phys. Chem. Solids, 24 (1963) 823.
213. MANFREDOTTI C., FIZZOTTI F., LO GIUDICE A., MUCERA G., POLESELLO P., VITTONE E., MANKELEVICH Y. A. and SUETIN N. V., Diamond Relat. Mater., 6 (1997) 1051.
214. MANFREDOTTI C., FIZZOTTI F., LO GIUDICE A., MUCERA G., POLESELLO P., VITTONE E., MARIOTTO G., VINEGONI C. and CAZZANELLI E., SPIE Conference on Laser in Synthesis, Processing and Characterisation of Synthetic Diamond, Taskent, October 1997, Proc. SPIE,3484 (1997) 195.
215. MANFREDOTTI C., POLESELLO P., TRUCCATO M., VITTONE E., LO GIUDICE A. and FIZZOTTI F., Proceedings of the Fifth Workshop on GaAs Detectors and Related Compounds, Cividale del Friuli, Italy, June 1997. Nucl. Instrum. Methods A, 410 (1998) 96.
216. MANFREDOTTI C., APOSTOLO G., FIZZOTTI F., LO GIUCICE A., MORANDO M., PIGNOLO R., POLESELLO P., TRUCCATO M., VITTONE E. and NASTASI U., Diamond Relat. Mater., 7 (1998) 523.
217. BORCHI E., BRUZZI M., BUCCIOLINI M., GUASTI A., PIROLLO S. and SCIORTINO S., TSC Response of Irradiated CVD Diamond Films, Proceedings of the Second International Confererence on Radiation Effects in Semiconductor Materials Detectors and Devices, Florence, March 1998, Nucl. Instrum. Methods A, 426 (1999) 181.
218. BIZZARRI A., BOGANI F., BRUZZI M. and SCIORTINO S., Luminescence and Conductivity in Studies on CVD Diamond Exposed to UV light, Proceedings of the Second International Confererence on Radiation Effects in Semiconductor Materials Detectors and Devices, Florence, March 1998, Nucl. Instrum. Methods A, 426 (1999) 169.
219. BORCHI E., BRUZZI M., PIROLLO S. and SCIORTINO S., Solid State Electron, 42 (1998) 674.
220. FELDMAN L. C. and MAYER J. W., Fundamentals of Surface and Thin Film Analysis (North-Holland, New York).
221. CHEETHAM A. K. and DAY P. (Editors), Solid State Chemistry Techniques (Oxford University Press) 1988.
222. RIGATO V. and BELLA MEA G., Nucl. Instrum. Methods Phys. Res. A, 334 (1993) 210.
223. VUPPULADHADIUM R. et al., J. Appl. Phys., 77 (1995) 2714.
224. DOLLINGER G. et al., Diamond Relat. Mater., 4 (1995) 591.
225. SPICKA H., GRIESSER M., HUTTER H., GRASSERBAUER M., BOHR S., HAUBNER R. and LUX B., Diam. Relat. Mater. 5 (1996) 383.
226. PACE E., MANDO P., GIUNTINI L. and SANTORO M., 9th Cimtec-World Forum on New Materials, Symposium IV-Diamond Films edited by P. VICENZINI (Techna s.r.l.) 1999, pp. 207-214.
227. MANFREDOTTI C., FIZZOTTI F., VITTONE E., LO GIUDICE A., POLESELLO P., GALASSINI S., JAKSIC M., FAZINIC S. and BOGDANOVIC I., Nucl. Instrum. Methods Phys. Res. B, 109/110 (1996) 555.
228. WERTZ J. E. and BOLTON J. R., in Electron Spin Resonance, Elementary Theory and Practical Applications (McGraw-Hill, Inc., New York) 1972, pp. 38-48.
229. SMITH W. V., SOROKIN P. P., GELLES I. L. and LASHER G. J., Phys. Rev. B, 115 (1959) 1546.
230. KARPUKHINA T. A., BOUILOV L. L. and CHUVAEV, Surf. Coatings Technol., 47 (1991) 538.
231. SAMSONENKO N. D., TOKIY V. V., GOBAN S. V. and TIMCHENKO V. I., Surf. Coatings Technol., 47 (1991) 618.
232. ADEL M. E., KALISH R. and PRAWER S., Appl. Phys. Lett., 62 (1987) 4096.