Fieldmap of morphology of diamond films grown by use of d.c. plasma glow discharge chemical vapour deposition

Materials Science and Engineering B

Volumn 53, Issue 3, 1998, Pages 284-299

  Bacci, T ^a   Borchi, E ^a,b   Bruzzi, M ^a,b   Santoro, M ^a,c   Sciortino, S ^a,b  

^a UNIVERSITY OF FLORENCE   (Italy)

^b INFN SEZIONE DI FIRENZE   (Italy)

^c INFM   (Italy)

Author keywords

Chemical vapour deposition; Diamond films; SEM analysis; X ray diffraction

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; GLOW DISCHARGES; MORPHOLOGY; PLASMA APPLICATIONS; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TEXTURES; THERMAL EFFECTS; X RAY DIFFRACTION ANALYSIS;

FIELDMAP;

DIAMOND FILMS;

EID: 0009641561     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00141-X     Document Type: Article

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