Investigations of the incorporation of B, P and N into CVD-diamond films by secondary ion mass spectrometry

Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 383-387

  Spicka, H ^a   Griesser, M ^a   Hutter, H ^a   Grasserbauer, M ^a   Bohr, S ^a   Haubner, R ^a   Lux, B ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

Diamond; Doping; Hot filament CVD; NRA; SIMS

Indexed keywords

EID: 0000360696     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00381-9     Document Type: Article

References (19)

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