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Journal of the Electrochemical Society

Volumn 150, Issue 5, 2003, Pages

Atomic force microscopy examination of Cu electrodeposition in trenches

(3) Kang, Myungchan a Gross, Mihal E b Gewirth, Andrew A a

a University of Illinois at Urbana Champaign (United States)

b AGERE SYSTEMS (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDS; ATOMIC FORCE MICROSCOPY; COPPER; DISSOLUTION; ELECTROLYTES; GRAIN SIZE AND SHAPE; POLYETHYLENE GLYCOLS; SCANNING ELECTRON MICROSCOPY;

BENZOTRIAZOLE; CHLORIDE;

ELECTRODEPOSITION;

EID: 0038324027 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.1562597 Document Type: Article

Times cited : (28)

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