Growth and properties of sputtered zirconia and zirconia-silica thin films

Thin Solid Films

Volumn 429, Issue 1-2, 2003, Pages 40-45

  Kuo, D H ^a   Chien, C H ^a  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

Author keywords

Dielectric properties; Optical properties; Sputtering; Stress

Indexed keywords

ADHESION; AMORPHOUS FILMS; FILM GROWTH; MAGNETRON SPUTTERING; OPACITY; PERMITTIVITY; REFRACTIVE INDEX; SILICA; THERMAL EFFECTS; ZIRCONIA;

ZIRCONIA-SILICA THIN FILMS;

THIN FILMS;

EID: 0037960265     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00143-3     Document Type: Article

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