Growth and properties of titania and aluminum titanate thin films obtained by r.f. magnetron sputtering

Thin Solid Films

Volumn 420-421, Issue , 2002, Pages 497-502

  Kuo, D H ^a   Tzeng, K H ^a  

^a NATIONAL DONG HWA UNIVERSITY   (Taiwan)

Author keywords

Aluminum titanate; Dielectric property; Mechanical property; Optical property; Titania

Indexed keywords

ALUMINUM COMPOUNDS; AMORPHOUS FILMS; DIELECTRIC FILMS; FILM GROWTH; MAGNETRON SPUTTERING; OPACITY; REFRACTIVE INDEX; TITANIUM OXIDES;

METAL OXIDE FILMS;

THIN FILMS;

EID: 0037011038     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(02)00945-8     Document Type: Conference Paper

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