Dielectric properties of ceria and yttria-stabilized zirconia thin films grown on silicon substrates

Solid State Ionics

Volumn 130, Issue 1, 2000, Pages 105-110

  Hartmanova, M ^a   Gmucova, K ^a   Thurzo, I ^a  

^a INSTITUTE OF PHYSICS   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE MEASUREMENT; CERIUM COMPOUNDS; FILM GROWTH; HYSTERESIS; MIS DEVICES; PERMITTIVITY; SILICON; THIN FILMS; VOLTAGE MEASUREMENT; YTTRIUM COMPOUNDS; ZIRCONIA;

CERIA-STABILIZED ZIRCONIA; YTTRIA-STABILIZED ZIRCONIA;

DIELECTRIC FILMS;

EID: 0033742008     PISSN: 01672738     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-2738(00)00285-X     Document Type: Article

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