SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 398, Issue 399, 2001, Pages 35-40

Growth and properties of alumina films obtained by low-pressure metal-organic chemical vapor deposition

(3) Kuo, Dong Hau a Cheung, Bo Yu a Wu, Ren Jye b

a NATIONAL DONG HWA UNIVERSITY (Taiwan)

b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Taiwan)

Author keywords

Metal organic chemical vapor deposition; Oxide; Thin film

Indexed keywords

ACTIVATION ENERGY; ADHESION; ALUMINA; ARGON; ATOMIC FORCE MICROSCOPY; FILM GROWTH; FILM PREPARATION; GLASS; HARDNESS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; STRESS ANALYSIS; SUBSTRATES; VAPORIZATION;

CRACKED SURFACES;

AMORPHOUS FILMS;

EID: 0035506997 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01300-1 Document Type: Article

Times cited : (48)

References (30)

1
- 0004233827
- VCH Publishers, Inc, New York
- (1996) CVD of Non-Metals , pp. 282
- Rees, W.S.¹

2
- 0006669881
- (1967) Proc. IEEE , vol.55 , pp. 1168
- Tombs, N.C.¹ Wegener, H.A.² Newman, R.³ Kenny, B.T.⁴ Coppola, A.J.⁵

3
- 0001369713
- (1963) IEEE Trans. Electron. Dev. , vol.16 , pp. 333
- Zaininger, K.H.¹ Waxman, A.S.²

4
- 36549104724
- (1985) Appl. Phys. Lett. , vol.47 , pp. 1071
- Hashimoto, S.¹ Peng, J.L.² Gibson, W.M.³

5
- 84916809891
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2259
- Sundgren, J.E.¹ Hentzell, H.T.G.²

6
- 0003477452
- Noyes Publications, New Jersey, USA
- (1992) Handbook of Chemical Vapor Deposition: Principles, Technology, and Applications , pp. 227
- Pierson, H.O.¹

7
- 85121089138
- (1983) J. Electrochem. Soc. , vol.125 , pp. 902
- Silvestri, V.J.¹ Osburn, C.M.² Ormand, D.W.³

8
- 0002842242
- (1995) Thin Solid Films , vol.258 , pp. 67
- Kim, Y.C.¹ Chun, J.S.² Lee, W.J.³

9
- 84975354374
- (1967) J. Electrochem. Soc. , vol.114 , pp. 948
- Aboaf, J.A.¹

10
- 0028384259
- (1994) Surf. Coat. Technol. , vol.63 , pp. 145
- Haanappel, V.A.C.¹ Van Corbach, H.D.² Fransen, T.³ Gellings, P.J.⁴

11
- 0029306508
- (1995) Surf. Coat. Technol. , vol.72 , pp. 1
- Haanappel, V.A.C.¹ Rem, J.B.² Van Corbach, H.D.³ Fransen, T.⁴ Gellings, P.J.⁵

12
- 0029306526
- (1995) Surf. Coat. Technol. , vol.72 , pp. 13
- Haanappel, V.A.C.¹ Van Corbach, H.D.² Fransen, T.³ Gellings, P.J.⁴

13
- 0031167868
- (1997) J. Mater. Sci. Lett. , vol.16 , pp. 1023
- Ha, H.Y.¹ Lee, J.S.² Nam, S.W.³ Kim, I.W.⁴ Hong, S.A.⁵

14
- 36449007376
- (1992) Appl. Phys. Lett. , vol.60 , pp. 322
- Maruyama, T.¹ Arai, S.²

15
- 34047177208
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2079
- Maruyama, T.¹ Nakai, T.²

16
- 0003602826
- Academic Press
- (1992) The Materials Science of Thin Films , pp. 552
- Ohring, M.¹

17
- 0024755517
- (1989) J. Electrochem. Soc. , vol.136 , pp. 3139
- Saraie, J.¹ Ono, K.² Takeuchi, S.³

18
- 0027641593
- (1993) Thin Solid Films , vol.230 , pp. 156
- Kim, J.S.¹ Marzouk, H.A.² Reucroft, P.J.³ Robertson, J.D.⁴ Hamrin, C.E.⁵

19
- 0020749720
- (1983) J. Electron. Mater. , vol.12 , pp. 587
- Ehle, R.S.¹ Baliga, B.J.² Katz, W.³

20
- 0020475746
- (1982) Thin Solid Films , vol.97 , pp. 97
- Kim, J.G.¹ Park, C.S.² Chun, J.S.³

21
- 25944477068
- (1963) Thermochim. Acta , vol.85 , pp. 907
- Schulman, G.P.¹ Trusty, M.² Vickers, J.H.³

22
- 85121089549
- (1998) Surf. Coat. Technol. , vol.108 , Issue.109 , pp. 257
- Täschner, C.¹ Ljungberg, B.² Alfredsson, V.³ Endler, I.⁴ Leonhardt, A.⁵

23
- 0006671402
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 1240
- Jones, F.¹ Logan, J.²

24
- 0031270283
- (1997) Thin Solid Films , vol.310 , pp. 260
- Wang, H.L.¹ Lin, C.H.² Hon, M.H.³

25
- 0006872192
- Plenum, New York
- (1970) Physics of Non-Metallic Thin Films , vol.B-14
- Hoffman, R.W.¹

26
- 0003691085
- McGraw-Hill International
- (1997) Thin Film Technology Handbook , pp. 3-4
- Elshabini-Riad, A.A.R.¹ Barlow III, F.D.²

27
- 0026858018
- (1992) J. Electrochem. Soc. , vol.139 , pp. 1437
- Ramkumar, K.¹ Saxena, A.N.²

28
- 0000357002
- (1921) Philos. Trans. R. Soc. Lond. A , vol.221 , pp. 163
- Griffith, A.A.¹

29
- 0024934460
- (1989) Thin Solid Films , vol.181 , pp. 597
- Schemmel, T.D.¹ Cunningham, R.L.² Randhawa, H.³

30
- 0030284806
- (1996) Thin Solid Films , vol.288 , pp. 120
- Patil, P.V.¹ Bendale, D.M.² Puri, R.K.³ Puri, V.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.