SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 287, Issue 1-2, 1996, Pages 104-109

Yttria-stabilized zirconia thin films grown by reactive r.f. magnetron sputtering

(5) Tomaszewski, Henryk a Haemers, Johan b Denul, Jurgen b De Nico, Roo b De Gryse, Roger b

a Department of Micro and Nanotechnology of Wide Bandgap Semiconductors (Poland)

b GHENT UNIVERSITY (Belgium)

Author keywords

Coatings; Optical properties; Oxides; X ray diffraction

Indexed keywords

CRYSTAL ORIENTATION; FILM GROWTH; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; POLYCRYSTALLINE MATERIALS; SUBSTRATES; THERMAL EFFECTS; THIN FILMS; X RAY CRYSTALLOGRAPHY;

CRYSTALLOGRAPHIC ORIENTATION; REACTIVE MAGNETRON SPUTTERING;

ZIRCONIA;

EID: 0030263345 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(96)08743-3 Document Type: Article

Times cited : (29)

References (13)

1
- 0344575336
- R.E. Russo, R.P. Reade, J.M. McMillan and B.L. Olsen, J. Appl. Phys., 68 (1990) 1354.
- (1990) J. Appl. Phys. , vol.68 , pp. 1354
- Russo, R.E.¹ Reade, R.P.² McMillan, J.M.³ Olsen, B.L.⁴

2
- 0041132113
- E. Narumi, L.W. Song, F. Yang, S. Patel, Y.H. Kao and D.T. Shaw, Appl. Phys. Lett., 56 (1990) 2684.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 2684
- Narumi, E.¹ Song, L.W.² Yang, F.³ Patel, S.⁴ Kao, Y.H.⁵ Shaw, D.T.⁶

3
- 0041873460
- S. H. Wang, A. Dasgupta, R. Laibowitz (eds.), Warrendale, 420 Commonwealth PA 150186
- R.E. Russo, R.P. Reade, P. Berdahl, J.M. McMillan and B.L. Olsen, Proc. 2nd Int. Symp. on High Temperature Superconducting Compounds; Processing and Superconducting Properties, Anaheim, CA, February, 1990, S. H. Wang, A. Dasgupta, R. Laibowitz (eds.), Warrendale, 1990, 420 Commonwealth PA 150186, pp. 511.
- (1990) Proc. 2nd Int. Symp. on High Temperature Superconducting Compounds; Processing and Superconducting Properties, Anaheim, CA, February, 1990 , pp. 511
- Russo, R.E.¹ Reade, R.P.² Berdahl, P.³ McMillan, J.M.⁴ Olsen, B.L.⁵

4
- 0001522009
- X.D. Wu, R.E. Muenchausen, S.E. Nogar, A. Pique, R. Edwards, B. Wilheus, T.S. Ravi, D.M. Hwang and C.Y. Chen, Appl. Phys. Lett., 58 (1991) 304.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 304
- Wu, X.D.¹ Muenchausen, R.E.² Nogar, S.E.³ Pique, A.⁴ Edwards, R.⁵ Wilheus, B.⁶ Ravi, T.S.⁷ Hwang, D.M.⁸ Chen, C.Y.⁹

5
- 0001527594
- A.S. Kao and G.L. Gorman, J. Appl. Phys., 67 (1990) 3826.
- (1990) J. Appl. Phys. , vol.67 , pp. 3826
- Kao, A.S.¹ Gorman, G.L.²

6
- 0001157983
- F. Jones, J. Vac. Sci. Technol., A6(6) (1988) 3088.
- (1988) J. Vac. Sci. Technol. , vol.A6 , Issue.6 , pp. 3088
- Jones, F.¹

7
- 21544445051
- D.K. Fork, D.B. Fenner, G.A.N. Connell, J.M. Philips and T.H. Geballe, Appl. Phys. Lett., 57 (1990) 1137.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1137
- Fork, D.K.¹ Fenner, D.B.² Connell, G.A.N.³ Philips, J.M.⁴ Geballe, T.H.⁵

8
- 84957224343
- E.S. Thiele, L.S. Wang, T.O. Mason and S.A. Barnett, J Vac. Sci. Technol., A9(6) (1991) 3054.
- (1991) J Vac. Sci. Technol. , vol.A9 , Issue.6 , pp. 3054
- Thiele, E.S.¹ Wang, L.S.² Mason, T.O.³ Barnett, S.A.⁴

9
- 0000807595
- R.P. Reade, X.L. Mao and R.E. Russo, Appl. Phys. Lett., 59 (1991) 739.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 739
- Reade, R.P.¹ Mao, X.L.² Russo, R.E.³

10
- 0041372699
- M. Migliuolo, Ch.Y. Hung and E. Schlesinger, Supercond. Ind., 17 (1994) 18.
- (1994) Supercond. Ind. , vol.17 , pp. 18
- Migliuolo, M.¹ Hung, Ch.Y.² Schlesinger, E.³

11
- 0020940620
- R. Swanepoel, J. Phys. E, 16 (1983) 1214.
- (1983) J. Phys. E , vol.16 , pp. 1214
- Swanepoel, R.¹

12
- 0029208493
- H. Tomaszewski and K. Godwod, J. Eur. Ceram. Soc., 15 (1995) 17.
- (1995) J. Eur. Ceram. Soc. , vol.15 , pp. 17
- Tomaszewski, H.¹ Godwod, K.²

13
- 0041372701
- D. Poelman, R.L. Van Meirhaeghe, W.H. Laflere and F. Cardon, J. Luminesc., 52 (1992) 259.
- (1992) J. Luminesc. , vol.52 , pp. 259
- Poelman, D.¹ Van Meirhaeghe, R.L.² Laflere, W.H.³ Cardon, F.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.