Dielectric study of thin films of Ta2O5 and ZrO2

IEEE Transactions on Dielectrics and Electrical Insulation

Volumn 8, Issue 4, 2001, Pages 648-651

  Jonsson, A K ^a   Frenning, G ^a   Nilsson, M ^a   Mattsson, M S ^a   Niklasson, G A ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY; ELECTRIC IMPEDANCE; PERMITTIVITY; SPECTROSCOPIC ANALYSIS; SPUTTERING; SWITCHING; TANTALUM COMPOUNDS; ZIRCONIA;

ELECTRONIC CONDUCTION;

THIN FILMS;

EID: 0035414661     PISSN: 10709878     EISSN: None     Source Type: Journal    
DOI: 10.1109/94.946718     Document Type: Article

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