Oxidation mechanism of the ammonium-fluoride-treated Si(100) surface

Journal of Applied Physics

Volumn 80, Issue 9, 1996, Pages 5408-5414

  Kluth, G Jonathan ^a   Maboudian, Roya ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001388177     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362727     Document Type: Article

References (25)

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