Thin Teflon-like films for MEMS: Film properties and reliability studies

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 114-124

  Smith, Bradley K ^a   Brown, Craig D ^b   LaVigne, Glenn ^a   Sniegowski, Jeffry J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Adhesion; Fluorocarbon; MEMS; Micromachining; Microstructures; Pol ysilicon; Stiction; Teflon

Indexed keywords

CONTACT ANGLE; FLUOROCARBONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PLASMA SOURCES; POLYSILICON; POLYTETRAFLUOROETHYLENES; REFRACTIVE INDEX; RELIABILITY; STICTION; TEMPERATURE; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

SELF ASSEMBLED MONOLAYER; TEFLON-LIKE FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038674754     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324289     Document Type: Conference Paper

References (16)

1. R. Maboudian and R. T. Howe, "Critical Review: Adhesion in surface micromechanical structures", J. Vac. Sci. Technol. B (15) 1, pp. 1-20, Jan/Feb 1997.
2. M. G. Lim, J. C. Chang, D. P. Schultz, R. T. Howe, and R. M. White, "Polysilicon Microstructures to Characterize Static Friction", Proc. IEEE MEMS Workshop, Napa Valley, CA, USA, pp. 82-88, Feb. 11-14, 1990.
3. K. Deng, R. J. Collins, M. Mehregany, and C. N. Sukkenik, "Performance Impact of Monolayer Coating on Polysilicon Micromotors", J. Electrochem. Soc., 142, pp. 1278-1285, 1995.
4. P.F. Man, B.P. Gogoi, and C.H. Mastrangelo, "Elimination of Post-Release Adhesion in Microstructures Using Thin Conformal Fluorocarbon Coatings", Journal of Microelectromechanical Systems, Vol. 6, No. 1, pp. 25-34, 1997.
5. P.D. Buzzard, "Plasma Polymerization of Tetrafluoroethylene in a Field Free Zone", Master's Thesis, University of California, Berkeley 1978.
6. H. V. Jansen, J. G. E. Gardeniers, J. Elders, H. A. C. Tilmans and M. Elwenspoek, "Applications of fluorocarbon polymers in micromechanics and micromachining," Sensors and Actuators A, 41-42, pp. 136-140, 1994.
7. M.R. Houston, R Maboudian, and R.T. Howe, "Self-Assembled Monolayer Films as Durable Anti-Stiction Coatings for Polysilicon Microstructures", 1996 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, pp. 42-47, June 1996.
8. B.K. Smith, J. J. Sniegowski, G. LaVigne, and C. Brown, "Thin teflon-like films for eliminating adhesion in released polysilicon microstructures", Transducers 97, Chicago, Ill., pp. 245-248, June 1997.
9. J.J. Sniegowski, S.L. Miller, G.F. LaVigne, M.S. Rodgers and P.J. McWhorter, "Monolithic Geared-Mechanisms Driven by a Polysilicon Surface-Micromachined On-Chip Electrostatic Microengine", 1996 Solid-State Sensor and Actuator Workshop, Hilton Head, SC, USA, pp. 178-182, June 1996.
10. E. J. Garcia and J. J. Sniegowski, Sensors and Actuators A, Vol. 48, pp. 203-214, 1995.
11. L. A. Wall, Fluoropolymers, Vol. 25, Wiley-Interscience, New York, 1971.
12. B. E. M. Wientjes, Handboek Kunststof Halffabrikaten, University of Twente, Netherlands, 1986.
13. R. Vieweg, M. Reiher, and H. Scheurlen, Kunststoff-Handbuch, Band XI, Carl Hauser, Munich, 1971.
14. Dr. Richard Buss, Sandia National Laboratories, Department 1812, Electronic and Optical Materials.
15. S. Miller, J. J. Sniegowski, G. LaVigne, and P. J. McWhorter, "Friction in Surface Micromachined Microengines", Proc. SPIE Smart Electronics and MEMS Vol. 2722, San Diego, CA, USA, pp. 197-204, Feb. 28-29, 1996.
16. Handbook of Chemistry and Physics, CRC Press, pp F-21, 1977.