Surface structures of silicon nitride thin films on Si(111)

Thin Solid Films

Volumn 366, Issue 1-2, 2000, Pages 121-128

  Zhai, Guangjie ^a   Yang, Jianshu ^a   Cue, Nelson ^a   Wang, Xue Sen ^a  

^a HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; CRYSTALLINE MATERIALS; EPITAXIAL GROWTH; LOW ENERGY ELECTRON DIFFRACTION; NITRIDING; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SILICON NITRIDE; SURFACE STRUCTURE;

NITRIDATION; SURFACE SUPERSTRUCTURE;

THIN FILMS;

EID: 0034188155     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00852-X     Document Type: Article

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