Evolution of surface morphology in the initial stage of nitridation of the Si(111)-7 × 7 surface by nitrogen ions

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 1893-1898

  Ha, Jeong Sook ^a   Park, Kang Ho ^a   Yun, Wan Soo ^a   Lee, El Hang ^a   Park, Seong Ju ^b  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001158066     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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