Diamond tip fabrication by air-plasma etching of diamond with an oxide mask

Diamond and Related Materials

Volumn 8, Issue 12, 1999, Pages 2169-2171

  Baik, Eun Song ^a,b   Baik, Young Joon ^a   Jeon, Dongryul ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Myong Ji University   (South Korea)

Author keywords

Conical shape; Diamond micro tips array; Dirty etching process; Facetting of mask

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC CURRENT MEASUREMENT; ELECTRIC FIELD MEASUREMENT; ELECTRON EMISSION; HYDROGEN; MASKS; OXIDES; PLASMA ETCHING; PLASMAS; POLYCRYSTALLINE MATERIALS; SURFACE CLEANING; SURFACE PROPERTIES;

DIAMOND TIPS; OXIDE MASKS;

DIAMOND FILMS;

EID: 0033328543     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(99)00185-5     Document Type: Article

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