Advances and development in CVD technology

Materials Science and Engineering: A

Volumn 209, Issue 1-2, 1996, Pages 366-371

  Hintermann, H E ^a  

^a NONE   (Switzerland)

Author keywords

Chemical vapour deposition; Diamond coatings; Silicon

Indexed keywords

COATING TECHNIQUES; COATINGS; DIAMOND FILMS; SILICON;

DIAMOND COATINGS;

CHEMICAL VAPOR DEPOSITION;

EID: 0042728262     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/0921-5093(95)10131-4     Document Type: Article

References (24)

1. H.E. Hintermann and A.K. Chattopadhyay, Annales CIRP 42/2 (1993) 769; which publication served as the basis for the present article.
2. C.. Müller, W. Hänni, M. Binggeli and H.E. Hintermann, Diamond Relat. Mater., 2 (1993) 1211.
3. W. Hänni, C. Müller, M. Binggeli, H.E. Hintermann, P. Krebs and A. Grisel, Thin Solid Films, 236 (1993) 87.
4. M. Binggeli, J.P. Dan, A. Grisel, W. Hänni, H.E. Hintermann, P. Krebs and C. Müller, in M. Yoshikawa, Y. Tzeng, W.A. Yarborough, (eds), Proc. Conf. Appl. Diamond Films and Related Materials, ADC'93 Saitama, Japan, (1993) p. 51.
5. CSEM, Centre Suisse d'Electronic et de Microtechnique SA, CH-2000 Neuchâtel, Switzerland.
6. M.A. Tamor, Diamond Films '92, Diamond Relat. Mater., to be published.
7. M. Werner, K. Holzner, O. Dorsch, E. Obermeier, R.E. Harper, C. Johnston, P.R. Chalter and I.M. Buckley-Golder, Diamond Films '92, Heidelberg, Diamond Relat. Mater., 2 (1992) 1096.
8. MICROSENS SA, CH-2000 Neuchâtel, Switzerland.
9. F. Okuzumi, J. Matsuda and K. O'oka, Proc. Superabrasive '91 Conf., Chicago, IL, 15/1-14.
10. T. Nakamura, N. Fujimore, T. Nakai and S. Nakatani, Proc. Superabrasive '91 Conf., Chicago, IL, 15/15-29.
11. K. Saijo, M. Yagi, K. Shibuki and S. Takatsu, Surf. Coat. Technol., 43/44 (1990) 30.
12. P.K. Sen, Indust. Diamond Rev., 5 (1992) 228; De Beers Industrial Diamond Division. Documentation "CVDITE".
13. S. Söderberg, K. Westergren, L. Reineck, P.E. Ekholm and H. Shahani, Applications of Diamond Films and Related Materials, Elsevier, 1991, p. 43.
14. Kennametal Inc., Documentation on Diamond Tools.
15. J. Oakes, X.X. Pan, R. Haubner and B. Lux, Surf. Coat. Technol., 47 (1991) 600.
16. P.M. Stephan, R.A. Hay and C.D. Dean, Diamond Relat. Mater., 1 (1992) 710.
17. K. Saijo, K. Uno, M. Yagi, K. Shibuki and S. Takatsu, Applications of Diamond Films and Related Materials, Elsevier, 1991, p. 69.
18. Valenite Inc., Documentation on Diamond Tools.
19. F. Okuzumi, J. Matsuda and K. O'oka, Science and Technology of New Diamond, KTK, 1990, p. 149.
20. N. Kikuchi, H. Eto, T. Okamura and H. Yoshimura, Applications of Diamond Films and Related Materials, Elsevier, 1991, p. 61.
21. H. Usuki, N. Narutaki, Y. Yamane, S. Karasuno and T. Ito, Int. J. Jpn. Soc. Precision Eng., 25 (1992) 35.
22. T. Ito, Applications of Diamond Films and Related Materials, Elsevier, 1991, p. 77.
23. P.M. Stephan, Am. Ceram. Soc. Bull., 71 (1992) 1623.
24. Norton Company Diamond Film, Documentation - Wear Performance of CVD Diamond Thick and Thin Film Tools.