Fabrication of diamond membranes for MEMS using reactive ion etching of silicon

Thin Solid Films

Volumn 330, Issue 2, 1998, Pages 62-66

  Ramesham, R ^a   Ellis, C D ^a   Olivas, J D ^a   Bolin, S ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON BEAMS; MICROELECTROMECHANICAL DEVICES; MORPHOLOGY; PHOTOLITHOGRAPHY; POLYCRYSTALLINE MATERIALS; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SINGLE CRYSTALS; SYNTHETIC DIAMONDS;

DIAMOND MEMBRANES;

DIAMOND FILMS;

EID: 0032156789     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00825-6     Document Type: Article

References (16)

1. R. Ramesham M.F. Rose R.F. Askew R. Myres J. Mater. Sci. Lett. 15 1996 1551
2. S.L. Girshick C. Li B.W. Yu H. Han Plasma Chem. Plasma Processing 13 1992 169
3. M. Murakawa, T. Okada, S. Takeuchi, in: M. Yoshikawa, M. Murakawa, Y. Tzeng, W.A. Yarbrough (Eds.), 2nd Int. Conf. on the Applications of Diamond Films and Related Materials, MY, Tokyo, Japan, 1993, p. 497.
4. A. Hirata, T. Uchida, M. Yoshikawa, in: M. Yoshikawa, M. Murakawa, Y. Tzeng and W.A. Yarbrough (Eds.), 2nd Int. Conf. on the Applications of Diamond Films and Related Materials, MY, Tokyo, Japan, 1993, p. 469.
5. J. Wei Y. Tzeng Diamond Films Technol. 5 1995 79
6. J.W. Kim Y.J. Baik K.Y. Eun D.N. Yoon Thin Solid Films 212 1992 104
7. R. Ramesham T. Roppel C. Ellis D.A. Jaworske W. Baugh J. Mater. Res. 6 1991 1278
8. J.L. Davidson R. Ramesham C. Ellis J. Electrochem. Soc. 137 1990 3206
9. M.C. Salvadori M. Cattani V. Mammana O. Monteiro J.W. Ager III I.G. Brown Thin Solid Films 291 1996 157
10. H. Noguchi M. Kashida Y. Kubota T. Takarada Proc. SPIE Int. Soc. Opt. Eng. 2793 1996 225
11. K. Deng W.H. Ko Sens. Actuators A (Physical) A35 1 1992 45
12. M.R. Houston, R.T. Howe, K. Komvopoulos, R. Maboudian, in: M.D. Drory, D.B. Bogy, M.S. Donley, J.E. Field (Eds.), Mechanical Behavior of Diamond and Other Forms of Carbon Symposium, 1995, pp. 391–402.
13. M. Aslam, D. Schulz , 8th Int. Conf. on Solid-State Sensors and Actuators and Eurosensors IX, Digest of Technical Papers, Vol. 2, 1995, p. 3.
14. R. Ramesham C. Ellis J. Mater. Res. 7 1992 1195
15. J.L. Davidson C. Ellis R. Ramesham J. Electron. Mater. 18 1989 711
16. R. Ramesham T. Roppel B.F. Hajek C. Ellis J. Electrochem. Soc. 137 1990 3203