High-temperature diamond capacitor

Diamond and Related Materials

Volumn 8, Issue 10, 1999, Pages 1875-1877

  Ebert, W ^a   Adamschik, M ^a   Gluche, P ^a   Floter A ^b   Kohn, E ^a  

^a UNIVERSITY OF ULM   (Germany)

^b DAIMLER AG   (Germany)

Author keywords

Capacitor; High temperature diamond; Membrane

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; DIAMOND FILMS; DIELECTRIC FILMS; DOPING (ADDITIVES); ELECTRIC ADMITTANCE; FILM GROWTH; GRAIN SIZE AND SHAPE; MEMBRANES; MICROWAVES; NITROGEN; PLASMA APPLICATIONS;

DIAMOND MEMBRANES;

CAPACITORS;

EID: 0032678947     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00146-6     Document Type: Article

References (11)

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