Doping of diamond by the diffusion of interstitial atoms into layers containing a low density of vacancies

Diamond and Related Materials

Volumn 7, Issue 2-5, 1998, Pages 545-549

  Prins, Johan F ^a  

^a UNIVERSITY OF THE WITWATERSRAND   (South Africa)

Author keywords

Diamond; Electrical conductivity; Ion implantation; n type doping

Indexed keywords

DIFFUSION; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; HELIUM; ION IMPLANTATION; IONS;

INTERSTITIAL ATOMS;

DIAMONDS;

EID: 0031995530     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00251-3     Document Type: Article

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