Fabrication of a new broadband waveguide polarizer with a double-layer 190 nm period metal-gratings using nanoimprint lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2957-2960

  Wang, Jian ^a   Schablitsky, Steven ^a   Yu, Zhaoning ^a   Wu, Wei ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040708652     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590933     Document Type: Article

References (10)

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