Room temperature replication in spin on glass by nanoimprint technology

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2801-2805

  Matsui, S ^a   Igaku, Y ^a   Ishigaki, H ^a   Fujita, J ^b   Ishida, M ^b   Ochiai, Y ^b   Komuro, M ^c   Hiroshima, H ^c  

^a UNIVERSITY OF HYOGO   (Japan)

^b NEC CORPORATION   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GLASS; GOLD; NANOSTRUCTURED MATERIALS; PHOTORESISTS; POLYMETHYL METHACRYLATES; REACTIVE ION ETCHING; SILICON; SUBSTRATES; TEMPERATURE; THERMAL EXPANSION;

COMPACT IMPRINTING SYSTEM; HYDRAULIC PRESS; NANOIMPRINT TECHNOLOGY; ROOM TEMPERATURE REPLICATION; SPIN ON GLASS;

NANOTECHNOLOGY;

EID: 0035519475     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1417547     Document Type: Article

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