Imprint characteristics by photo-induced solidification of liquid polymer

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 12 B, 2000, Pages 7075-7079

  Komuro, Masanori ^a   Taniguchi, Jun ^b   Inoue, Seiji ^b   Kimura, Naoya ^b   Tokano, Yuji ^b   Hiroshima, Hiroshi ^a   Matsui, Shinji ^c  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b TOKYO UNIVERSITY OF SCIENCE   (Japan)

^c UNIVERSITY OF HYOGO   (Japan)

Author keywords

Imprint; Liquid polymer; Lithography; Pattern replication; Photo polymer; Ultra violet light

Indexed keywords

IRRADIATION; LSI CIRCUITS; PLASTIC FILMS; SOLIDIFICATION; THERMAL EXPANSION; ULTRAVIOLET RADIATION;

LIQUID POLYMERS; PHOTO-INDUCED SOLIDIFICATION;

NANOTECHNOLOGY;

EID: 0034428895     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.7075     Document Type: Article

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