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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 12, 2002, Pages 7455-7461

Ar ion effect on mechanical properties of carbon nitride films prepared by ion-beam-assisted deposition

(3) Ohta, Hidenobu a,c Matsumuro, Akihito a Takahashi, Yutaka b

a NAGOYA UNIVERSITY (Japan)

b MIE UNIVERSITY (Japan)

c SEIKO EPSON CORPORATION (Japan)

Author keywords

Carbon nitride thin film; Ion bombardment effect; Ion beam assisted deposition; Mechanical property; Simultaneous bombardment

Indexed keywords

ARGON; CHEMICAL BONDS; ELECTRON BEAMS; ION BEAM ASSISTED DEPOSITION; ION BEAMS; STRENGTH OF MATERIALS; THIN FILMS; WEAR RESISTANCE;

CARBON NITRIDE FILMS;

CARBON NITRIDE;

EID: 0036992037 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.41.7455 Document Type: Article

Times cited : (5)

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