Nanoindentation studies on amorphous carbon nitride thin films prepared by shielded arc ion plating

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 719-723

  Takai, Osamu ^a   Tajima, Nobuhiro ^a   Saze, Hiroki ^a   Sugimura, Hiroyuki ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Amorphous carbon; Amorphous carbon nitride; Nanoindentation; Shielded arc ion plating

Indexed keywords

AMORPHOUS MATERIALS; CARBON NITRIDE; DEPOSITION; HARDNESS; PLATING; SHIELDING; WEAR RESISTANCE;

NANOHARDNESS;

THIN FILMS;

CARBON NITRIDE; DIAMOND-LIKE CARBON; FILM; HARDNESS; TEST APPARATUS; WEAR RESISTANCE;

EID: 0035387618     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01175-6     Document Type: Article

References (14)