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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 9 PART A/B, 1998, Pages

Enhanced growth of β-C3N4 crystallites at a high substrate temperature

(2) Hsu, Chia Yuan a Hong, Franklin Chau Nan a

a NATIONAL CHENG KUNG UNIVERSITY (Taiwan)

Author keywords

C3N4 crystallites; Carbon nitride; Inductively coupled plasma; Sputtering deposition; Substrate temperature

Indexed keywords

CHEMICAL BONDS; CRYSTAL GROWTH; CRYSTAL STRUCTURE; DISSOCIATION; ELECTRON DIFFRACTION; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

GAS DISSOCIATION; HIGH SUBSTRATE TEMPERATURE; TRANSMISSION ELECTRON DIFFRACTION;

NITRIDES;

EID: 0032155874 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.37.l1058 Document Type: Article

Times cited : (11)

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