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Volumn 31, Issue 4, 2002, Pages 971-988

Electron interactions with BCl3

Author keywords

[No Author keywords available]

Indexed keywords

CHLORINE COMPOUNDS; ELECTRON AFFINITY; ELECTRON SCATTERING; ELECTRONS; NEGATIVE IONS; RATE CONSTANTS;

EID: 0036948516     PISSN: 00472689     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1504440     Document Type: Article
Times cited : (14)

References (101)
  • 15
    • 0012521838 scopus 로고    scopus 로고
    • Technology Transfer No. 97043274A-TR, Sematech, August 22, (data quoted by Sematech's permission)
    • V. McKoy, C. Winstead, and W. L. Morgan, Data Compilation for Plasma Chemistries, Technology Transfer No. 97043274A-TR, Sematech, August 22, 1997 (data quoted by Sematech's permission).
    • (1997) Data Compilation for Plasma Chemistries
    • McKoy, V.1    Winstead, C.2    Morgan, W.L.3
  • 36
    • 0012522188 scopus 로고
    • Ph.D. dissertation, University of Maryland
    • J. K. Olthoff, Ph.D. dissertation, University of Maryland, 1985.
    • (1985)
    • Olthoff, J.K.1
  • 37
    • 0012525657 scopus 로고    scopus 로고
    • Ph.D. dissertation, Freie Universität Berlin
    • F. Brüning, Ph.D. dissertation, Freie Universität Berlin, 1999.
    • (1999)
    • Brüning, F.1
  • 83
    • 0012579504 scopus 로고    scopus 로고
    • private communication
    • K. Becker (private communication, 2000).
    • (2000)
    • Becker, K.1
  • 86
    • 0001584101 scopus 로고    scopus 로고
    • edited by K. A. Berrington and K. L. Bell (American Institute of Physics, New York)
    • Y.-K. Kim and K. K. Irikura, Atomic and Molecular Data and Their Applications, edited by K. A. Berrington and K. L. Bell (American Institute of Physics, New York, 2000), p. 220.
    • (2000) Atomic and Molecular Data and Their Applications , pp. 220
    • Kim, Y.-K.1    Irikura, K.K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.